SBIR Phase II: ELEX - Innovative Low-Cost Manufacturing Technology for High Aspect Ratio Microelectromechanical Systems (MEMS)

这个小型企业创新研究阶段（SBIR） II项目将进一步发展ELEX（电挤压），这是一种制造工艺，用于原型和批量制造高纵横比微机电系统（MEMS）和相关的微部件和微结构。目标是取代（在许多应用中）所谓的LIGA工艺，这是一种基于电沉积的技术，需要使用洁净室和同步加速器。该项目对MEMS行业的商业化潜力将大大降低成本和时间，这将大大加速MEMS和其他微尺度器件的商业化。

This Small Business Innovation Research Phase (SBIR) II project will further develop ELEX (Electro-Extrusion) which is a manufacturing process for prototyping and batch manufacturing high-aspect ratio microelectromechanical systems (MEMS) and related microparts and microstructures. The goal is to replace (in many applications) the so-called LIGA process, which is an electrodeposition-based technique, requiring the use of a clean room and synchrotron. The commercialization potential of this project to the MEMS industry will provide a dramatic reduction in cost and time, which will greatly accelerate the commercialization of MEMS and other microscale devices.