STTR Phase I: High Relative Permittivity Packaging to Enhance MEMS Gyroscopic Sensors

STTR 第一阶段：高相对介电常数封装以增强 MEMS 陀螺仪传感器

• 批准号: 0712339
• 负责人: James Brunsch
• 金额: --
• 依托单位: MEMSense, LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-07-01 至 2008-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0712339&HistoricalAwards=false
• 关键词: STTR; Phase; Relative; Permittivity; Packaging

This Small Business Technology Transfer (STTR) Phase I project will seek to significantly enhance the performance of MEMS gyroscopic sensors through the use of innovative packaging. This effort will be the firs step in the commercialization of a technique for augmenting electrostatic MEMS devices through hermetically packaging them in a gas chemistry that possesses a relative permittivity significantly greater than one, which results in an equivalent gain in each of the fundamental equations governing the performance of electrostatic MEMS devices. For example, sulfur dioxide is one gas that has been identified as suitable for this application. The result of utilizing this technique is the realization of an equivalent performance MEMS device that can be smaller, lower voltage and/or more powerful than the same device packaged in a vacuum or a traditional gas chemistry. MEMS gyroscopic sensors are particularly well suited to take advantage of this technology, due to the sensor's architecture where both electrostatic actuation and capacitive sensing are employed, and because of the large, but cost sensitive commercial market potential, which includes inertial sensing, automotive safety, the Segway Human Transporter and similar systems, and camcorder and digital camera image stabilization. If successful one of the outcomes of this effort will be an increased knowledgebase of the fluidic damping, dielectric breakdown, and relative permittivity voltage magnitude/frequency dependence properties of various gas chemistries that have not heretofore been investigated in this type of application. This should lead to new MEMS products, the application of existing MEMS products to new applications, and an enhanced understanding of the capabilities and limitations of micromachined devices.

该小型企业技术转让（STTR）第一阶段项目将寻求通过使用创新封装来显著提高MEMS陀螺仪传感器的性能。这一努力将是第一步的商业化的技术，用于增强静电MEMS器件通过密封封装它们在气体化学，具有相对介电常数显着大于一，这导致在每个基本方程的等效增益控制静电MEMS器件的性能。例如，二氧化硫是一种已被确定为适合于该应用的气体。利用该技术的结果是实现了等效性能的MEMS器件，该MEMS器件可以比封装在真空或传统气体化学中的相同器件更小、更低电压和/或更强大。MEMS陀螺仪传感器特别适合于利用该技术，这是由于传感器的结构采用静电致动和电容感测，并且由于大的但成本敏感的商业市场潜力，包括惯性感测、汽车安全、赛格威载人运输车和类似系统，以及摄像机和数码相机图像稳定。如果成功的结果之一，这一努力将是一个增加的知识基础的流体阻尼，介电击穿，和相对介电常数的电压幅度/频率依赖性的各种气体化学性质，迄今尚未在这种类型的应用程序中进行了研究。这将导致新的MEMS产品，现有的MEMS产品的应用到新的应用，并提高对微机械设备的能力和局限性的理解。