MRI: Acquisition of inductively coupled plasma etcher to support research and teaching in micro and nanodevices

这项研究的目标是推进微器件技术在化学、生物、电子和光学科学中的应用，以及新型纳米材料的基础和技术研究。该方法是购买一台电感耦合等离子体蚀刻机，与其他现有的共享设备一起使用，以创建本研究不可或缺的专用微米和纳米结构。 智力优势：蒙大拿州微加工设施（MMF）为涉及微器件和纳米结构的制造和测试的研究和培训提供了良好的环境。所需设备将促进 MEMS、MOEMS 和微光学、集成光学、微传感器、太赫兹波导器件、神经电记录器件、磁性薄膜材料和纳米线研究领域的富有成效的跨学科研究。 更广泛的影响：通过将其纳入 MMF，将确保区域研究人员能够使用新设备。由于它是一个用户设施，其操作模式是供学生和科学家开展自己的工作，因此 MMF 在教育和培训中发挥着重要作用。本科生、研究生和博士后科学家接受深入的研究培训和现代制造设备的经验。学习微加工和 MEMS 课程的本科生和研究生将接受使用相同工具的实践指导。密歇根州立大学夏季研究体验项目的学生和教师，包括蒙大拿州部落学院的学生和教师，也有机会接受有关这种新型 ICP 蚀刻工具的培训。此外，MMF 致力于支持我们地理区域的工业用户。

The objective of this research is the advancement of microdevice technology for applications in the chemical, biological, electronic and optical sciences, and the fundamental and technological investigation of new nanomaterials. The approach is to acquire an inductively coupled plasma etcher that will be used, in concert with other existing shared equipment, to create the specialized micro- and nanostructures that are integral to this research.Intellectual Merit: The Montana Microfabrication Facility (MMF) provides an excellent environment for research and training involving the fabrication and testing of microdevices and nanostructures. The requested equipment will facilitate productive, cross-disciplinary research in the areas of MEMS, MOEMS and micro-optics, integrated optics, microsensors, THz waveguide devices, neuro-electrical recording devices, magnetic thin film materials and nanowire research.Broader Impacts: Access for regional researchers to the new equipment will be assured through its incorporation into the MMF. Because it is a user facility where the operational model is for students and scientists to do their own work, the MMF plays an important role in education and training. Undergraduate students, graduate students and postdoctoral scientists receive in-depth research training and experience with modern fabrication equipment. Undergraduate and graduate students taking courses in microfabrication and MEMS receive hands-on instruction on the same tools. Students and faculty in MSU's summer research experiences program, including students and faculty from Montana's tribal colleges, also have the opportunity to receive training on this new ICP etching tool. Additionally, the MMF is committed to supporting industrial users from our geographic region.