MRI: Acquisition of inductively coupled plasma etcher to support research and teaching in micro and nanodevices

MRI：购买电感耦合等离子体蚀刻机以支持微纳米器件的研究和教学

• 批准号: 0722583
• 负责人: David Dickensheets
• 金额: $ 30万
• 依托单位: Montana State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-08-01 至 2009-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0722583&HistoricalAwards=false
• 关键词: MRI; Acquisition; inductively; coupled; plasma

The objective of this research is the advancement of microdevice technology for applications in the chemical, biological, electronic and optical sciences, and the fundamental and technological investigation of new nanomaterials. The approach is to acquire an inductively coupled plasma etcher that will be used, in concert with other existing shared equipment, to create the specialized micro- and nanostructures that are integral to this research.Intellectual Merit: The Montana Microfabrication Facility (MMF) provides an excellent environment for research and training involving the fabrication and testing of microdevices and nanostructures. The requested equipment will facilitate productive, cross-disciplinary research in the areas of MEMS, MOEMS and micro-optics, integrated optics, microsensors, THz waveguide devices, neuro-electrical recording devices, magnetic thin film materials and nanowire research.Broader Impacts: Access for regional researchers to the new equipment will be assured through its incorporation into the MMF. Because it is a user facility where the operational model is for students and scientists to do their own work, the MMF plays an important role in education and training. Undergraduate students, graduate students and postdoctoral scientists receive in-depth research training and experience with modern fabrication equipment. Undergraduate and graduate students taking courses in microfabrication and MEMS receive hands-on instruction on the same tools. Students and faculty in MSU's summer research experiences program, including students and faculty from Montana's tribal colleges, also have the opportunity to receive training on this new ICP etching tool. Additionally, the MMF is committed to supporting industrial users from our geographic region.

本研究的目标是推进微器件技术在化学、生物、电子和光学科学中的应用，以及新型纳米材料的基础和技术研究。该方法是获得一个电感耦合等离子体蚀刻机，将用于与其他现有的共享设备，以创建专业的微和纳米结构，是不可或缺的本research.Intellectual优点：蒙大拿州微制造设施（MMF）提供了一个极好的环境，研究和培训，涉及制造和测试的微器件和纳米结构。所要求的设备将有助于在微机电系统、微机电系统和微光学、集成光学、微传感器、太赫兹波导装置、神经电记录装置、磁性薄膜材料和纳米线研究等领域进行富有成效的跨学科研究。由于它是一个用户设施，其运作模式是让学生和科学家做自己的工作，所以货币基金组织在教育和培训方面发挥着重要作用。本科生，研究生和博士后科学家接受深入的研究培训和现代制造设备的经验。本科生和研究生在微细加工和MEMS课程接受相同的工具动手教学。密歇根州立大学暑期研究经验项目的学生和教师，包括蒙大拿州部落学院的学生和教师，也有机会接受这种新的ICP蚀刻工具的培训。此外，MMF致力于支持我们地理区域的工业用户。