CAREER: Experimental Investigation of Mechanical Properties of Nanoporous Thin Films

该学院早期发展（CAREER）计划拨款为综合研究和教育计划的发展提供资金，以调查纳米多孔薄膜的微观结构和机械性能。综合的，多尺度的实验方法，包括纳米压痕，激光诱导表面声波（LiSAW），激光诱导薄膜散射（LiTFS），和基于数字图像相关的超声全息（UHDIC）将被用来确定纳米多孔薄膜的微观结构与力学性能的关系。 特别是，研究将集中在孔隙率，孔结构和结晶度等对纳米多孔薄膜的本体，表面和界面性质的影响，以及它们在各种负载条件下的变形，分层，损伤和致密化机制。由于其有序的孔结构，结晶框架和主导作用，在纳米多孔材料市场，纳米多孔沸石薄膜将是本研究的初始焦点，而基础知识和建立的技术将转移到许多其他有序和无序的纳米多孔材料。如果成功的话，这项研究的结果将导致：1）提高基于科学的理解纳米多孔薄膜的工艺-微观结构-机械性能关系; 2）一套创新的实验工具，可用于研究各种各样的纳米多孔材料; 3）促进纳米多孔薄膜在微电子、能源材料、薄膜和涂料等广泛领域的加工和应用; 4）更多代表性不足的本科生，妇女和少数民族参与科学和工程; 5）更多的推广机会，以当地高中学生和教师，特别是那些经济或教育上处于不利地位的学生; 6）更大和更多样化的科学和技术劳动力在欠发达地区的南加州内陆帝国由加州大学滨江服务。

This Faculty Early Development (CAREER) Program grant provides funding for the development of an integrated research and education program to investigate the microstructural and mechanical properties of nanoporous thin films. The integrated, multiscale experimental approach including nanoindentation, laser-induced surface acoustic waves (LiSAW), laser-induced thin film spallation (LiTFS), and ultrasonic holography based digital image correlation (UHDIC) will be used to determine the microstructure-mechanical property relationship of nanoporous thin films. In particular, the study will focus on the effect of porosity, pore structure, and crystallinity etc on the bulk, surface and interface properties of nanoporous thin films, and their deformation, delamination, damage and densification mechanisms under various loading conditions. Due to their ordered pore structure, crystalline framework and dominating role in nanoporous materials market, nanoporous zeolite thin films will be the initial focus of this research while the fundamental knowledge and the established techniques will be transferable to many other ordered and non-ordered nanoporous materials. If successful, the results of this research will lead to: 1) improved science-based understanding of the process-microstructure-mechanical property relationship of nanoporous thin films; 2) a set of innovative experimental tools that can be used to study a wide variety of nanoporous materials; 3) promotion of processing and application of nanoporous thin films in a wide range of fields such as microelectronics, energy materials, and films and coatings; 4) the involvement of more underrepresented undergraduate students, women and minorities in science and engineering; 5) more outreach opportunities to local high school students and teachers, especially to those economically or educationally disadvantaged students; 6) a larger and more diverse science and technology workforce in the under developed regions at the Inland Empire of Southern California served by UC Riverside.