Wireless Passive Ceramic MEMS Sensors for High Temperature Applications

适用于高温应用的无线无源陶瓷 MEMS 传感器

• 批准号: 0823950
• 负责人: Xun Gong
• 金额: $ 29.98万
• 依托单位: The University of Central Florida Board of Trustees
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-09-01 至 2012-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0823950&HistoricalAwards=false
• 关键词: Wireless; Passive; Ceramic; MEMS; Sensors

Wireless Passive Ceramic MEMS Sensors for High-Temperature ApplicationsObjective:The objective of this research is to develop accurate and robust wireless passive high-temperature microsensors for in situ measurement of temperature and pressure inside turbine engines for power generation and aircraft propulsion systems. The approach is to investigate two types of sensors using the recently-developed multifunctional polymer-derived ceramics (PDCs). Intellectual Merits:Research on PDCs has revealed that PDCs possess outstanding multifunctionality including excellent thermo-electrical properties at high temperatures (up to 1500oC) thus providing direct transduction mechanisms for design and fabrication of high-temperature sensors. In order to sense the temperature and pressure wirelessly with high accuracy, high-Q microwave resonators sensitive to either temperature or pressure are necessary. Evanescent-mode resonators will be developed to measure the pressure while dielectric resonators will be used to measure the temperature. Broader Impacts: The proposed research will advance the sensor technologies beyond the current state by pushing the frontier of both materials science and microwave engineering and effectively combining these two interdisciplinary fields. This work can substantially benefit the turbine industries and their customers by providing sensing technology for potential performance improvement. Ultimately, the increased efficiency of using energy resulting from this proposed work can greatly help overcome the energy crisis that human beings are facing now and will have long-term effects on how to effectively utilize energy sources. This program also integrates research with education by training students in interdisciplinary areas and providing hands-on experience for K-12 students and underrepresented groups through the Orlando Science Center education program and Diversity and Minority Engineering Programs.

无线无源陶瓷MEMS传感器的高温应用目的：本研究的目的是开发准确和强大的无线无源高温微传感器，用于发电和飞机推进系统的涡轮机发动机内部的温度和压力的原位测量。该方法是研究两种类型的传感器使用最近开发的多功能聚合物衍生陶瓷（PDCs）。知识价值：对PDCs的研究表明，PDCs具有出色的多功能性，包括在高温（高达1500 ℃）下的优异热电性能，从而为高温传感器的设计和制造提供直接的转换机制。为了以高精度无线地感测温度和压力，需要对温度或压力敏感的高Q微波谐振器。渐逝模谐振器将被开发用于测量压力，而介质谐振器将被用于测量温度。更广泛的影响：拟议的研究将通过推动材料科学和微波工程的前沿并有效地结合这两个跨学科领域来推动传感器技术超越目前的状态。这项工作可以大大有利于涡轮机行业和他们的客户提供潜在的性能改进的传感技术。最终，这项拟议工作所带来的能源使用效率的提高将大大有助于克服人类目前面临的能源危机，并将对如何有效利用能源产生长期影响。该计划还将研究与教育相结合，通过培训学生在跨学科领域，并通过奥兰多科学中心教育计划和多样性和少数民族工程计划为K-12学生和代表性不足的群体提供实践经验。