Performance Enhancement of PZT Thin-Film Microactuators via a Multi-Scale, Multi-Domain Design
Performance Enhancement of PZT Thin-Film Microactuators via a Multi-Scale, Multi-Domain Design
批准号:
0826501
负责人:
I-Yeu Shen
金额:
$23.99万
依托单位:
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
2008
资助国家:
美国
项目状态:
已结题
起止时间:
2008-08-01 至 2012-07-31
中文摘要
点击翻译按钮获取中文摘要
英文摘要
Lead-Zirconium-Titanium Oxide (PZT) is a piezoelectric material widely used as actuators for bulk structures. Lately, PZT micro-actuators have received wide attention, because they could potentially outperform traditional micro-actuators (e.g., comb drives or thermal drives) in terms of bandwidth, energy density, and actuation strength. As a result, PZT micro-actuators enable various new impacting applications, such as minute hearing implants and miniaturized diagnostic tools that are less invasive. To enable this new technology, PZT micro-actuators must employ PZT thin films to maintain a proper aspect ratio to function and fundamental studies are needed to enhance actuator performance by orders of magnitude.It is proposed to enhance performance of PZT thin-film micro-actuators via multi-scale and multi-domain approaches that encompass nanotechnology and mechanics. There are two specific goals to achieve. The first goal is to use nanotechnology to enhance material properties and yield of PZT thin films. In particular, (a) PZT thin films via seeded nano-PZT particles and electrophoretic deposition and (b) Platinum bottom electrodes with nano-textures and indentation will be developed. The second goal is to introduce stress relief grooves in PZT thin films to maximize actuator displacement.
期刊论文(0)
专著(0)
科研奖励(0)
会议论文
Coupled Dynamics Between Flapping Wings and Vibrating Thorax During Insect Flight
-
批准号:1360590
-
项目类别:Standard Grant
-
资助金额:$25.77万
-
财政年份:2014
-
负责人:I-Yeu Shen
-
依托单位:
Development of PZT Thin-Film Microactuators for Intracochlear Applications
-
批准号:1159623
-
项目类别:Standard Grant
-
资助金额:$31.26万
-
财政年份:2012
-
负责人:I-Yeu Shen
-
依托单位:
Bio-Inspired Inner-Ear Microphones via a Piezoelectric Substrate and Nanorods
-
批准号:1030047
-
项目类别:Standard Grant
-
资助金额:$19.98万
-
财政年份:2010
-
负责人:I-Yeu Shen
-
依托单位:
Vibration Analysis and Health Diagnosis of Spinning Cyclic Symmetric Rotors with Flexible Bearing and Housing Supports
-
批准号:0969024
-
项目类别:Standard Grant
-
资助金额:$15.99万
-
财政年份:2010
-
负责人:I-Yeu Shen
-
依托单位:
A Workshop for NSF Cyber-Enabled Discoveries and Innovations Initiative in Conjunction with 2007 ASME International Mechanical Engineering Congress & Exhibition; Seattle,WA.
-
批准号:0803484
-
项目类别:Standard Grant
-
资助金额:$0.0万
-
财政年份:2007
-
负责人:I-Yeu Shen
-
依托单位:
A Unified Approach to Analyze Vibration of Rotating Flexible Structures
-
批准号:0244116
-
项目类别:Standard Grant
-
资助金额:$18.68万
-
财政年份:2003
-
负责人:I-Yeu Shen
-
依托单位:
Taming Vibration of Rotating Disk/Spindle Systems
-
批准号:9820745
-
项目类别:Standard Grant
-
资助金额:$16.09万
-
财政年份:1999
-
负责人:I-Yeu Shen
-
依托单位:
Characterization of Disk/Head Interfacial Contacts Through System Dynamics and Microelectromechanical Sensors
-
批准号:9800180
-
项目类别:Standard Grant
-
资助金额:$15.45万
-
财政年份:1998
-
负责人:I-Yeu Shen
-
依托单位:
A Nontraditional Vibration Analysis of Rotating Disk/SpindleSystems and Its Applications to Computer Hard Disk Drives
-
批准号:9634557
-
项目类别:Standard Grant
-
资助金额:$15.98万
-
财政年份:1996
-
负责人:I-Yeu Shen
-
依托单位:
Intelligent Constrained Layer - An Innovative Approach
-
批准号:9313071
-
项目类别:Continuing Grant
-
资助金额:$5.0万
-
财政年份:1994
-
负责人:I-Yeu Shen
-
依托单位:
Intelligent Constrained Layer - An Innovative Approach
-
批准号:9496149
-
项目类别:Continuing Grant
-
资助金额:$14.8万
-
财政年份:1994
-
负责人:I-Yeu Shen
-
依托单位:
海外基金