Performance Enhancement of PZT Thin-Film Microactuators via a Multi-Scale, Multi-Domain Design

铅锆钛氧化物（PZT）是一种广泛用作体结构致动器的压电材料。 最近，PZT微致动器受到了广泛的关注，因为它们可能优于传统的微致动器（例如，梳状驱动器或热驱动器）。 因此，PZT微致动器能够实现各种新的冲击应用，例如微小的听力植入物和侵入性较小的小型诊断工具。为了实现这一新技术，PZT微致动器必须采用PZT薄膜来保持适当的纵横比以发挥功能，并且需要基础研究来提高致动器性能的数量级。 有两个具体目标要实现。 第一个目标是利用纳米技术来提高PZT薄膜的材料性能和产量。 特别是，（a）PZT薄膜通过种子纳米PZT颗粒和电泳沉积和（B）铂底部电极与纳米纹理和压痕将被开发。 第二个目标是在PZT薄膜中引入应力释放凹槽以最大化致动器位移。

Lead-Zirconium-Titanium Oxide (PZT) is a piezoelectric material widely used as actuators for bulk structures. Lately, PZT micro-actuators have received wide attention, because they could potentially outperform traditional micro-actuators (e.g., comb drives or thermal drives) in terms of bandwidth, energy density, and actuation strength. As a result, PZT micro-actuators enable various new impacting applications, such as minute hearing implants and miniaturized diagnostic tools that are less invasive. To enable this new technology, PZT micro-actuators must employ PZT thin films to maintain a proper aspect ratio to function and fundamental studies are needed to enhance actuator performance by orders of magnitude.It is proposed to enhance performance of PZT thin-film micro-actuators via multi-scale and multi-domain approaches that encompass nanotechnology and mechanics. There are two specific goals to achieve. The first goal is to use nanotechnology to enhance material properties and yield of PZT thin films. In particular, (a) PZT thin films via seeded nano-PZT particles and electrophoretic deposition and (b) Platinum bottom electrodes with nano-textures and indentation will be developed. The second goal is to introduce stress relief grooves in PZT thin films to maximize actuator displacement.