Performance Enhancement of PZT Thin-Film Microactuators via a Multi-Scale, Multi-Domain Design

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Lead-Zirconium-Titanium Oxide (PZT) is a piezoelectric material widely used as actuators for bulk structures. Lately, PZT micro-actuators have received wide attention, because they could potentially outperform traditional micro-actuators (e.g., comb drives or thermal drives) in terms of bandwidth, energy density, and actuation strength. As a result, PZT micro-actuators enable various new impacting applications, such as minute hearing implants and miniaturized diagnostic tools that are less invasive. To enable this new technology, PZT micro-actuators must employ PZT thin films to maintain a proper aspect ratio to function and fundamental studies are needed to enhance actuator performance by orders of magnitude.It is proposed to enhance performance of PZT thin-film micro-actuators via multi-scale and multi-domain approaches that encompass nanotechnology and mechanics. There are two specific goals to achieve. The first goal is to use nanotechnology to enhance material properties and yield of PZT thin films. In particular, (a) PZT thin films via seeded nano-PZT particles and electrophoretic deposition and (b) Platinum bottom electrodes with nano-textures and indentation will be developed. The second goal is to introduce stress relief grooves in PZT thin films to maximize actuator displacement.