Investigation of Unconventional Cantilevers for Applications in High Speed Atomic Force Microscopy (AFM)

本研究的目的是研究非常规悬臂梁截面在高速原子力显微镜(AFM)中的应用。高速原子力显微镜对纳米制造中的质量控制具有重要意义。悬臂将通过聚合物成型技术制造，塑料通过热处理转化为碳化硅。我们将研究用标准制造方法制造几何形状的无缺陷悬臂梁的方法，这些方法即使不是不可能的，也是困难的。该项目的智力价值在于增加了对陶瓷聚合物在制造微电子机械系统(MEMS)中的应用的了解。这项工作将扩大MEMS研究人员可获得的悬臂梁几何图形。此外，它还将阐明热转换条件在控制这类材料中裂纹形成方面的作用。这些结果可以应用于任何数量的陶瓷前聚合物的应用。更广泛的影响是能够更广泛地使用高速AFM来进行纳米制造中的质量控制，以及允许对化学和生物动态过程进行详细的成像。更高的谐振频率(从而更高的扫描速度)与使用廉价成型技术制造悬臂梁的能力相结合的性能优势将对纳米制造、微电子和生物医学行业产生实质性的好处。一种易于制造碳化硅基微机械的方法的示范将对微电子产业的国际竞争力产生重大影响。最后，参与该项目的学生将接触到先进的MEMS制造技术，以及电气和塑料工程、物理、化学和材料科学交叉领域的独特专业知识。特别是，发展新的视角和创造性的解决问题的技能是这种性质的跨学科研究不可或缺的一部分，并将培养学生的成功。

The objective of this research is to investigate unconventional cantilever cross sections for applications in high speed Atomic Force Microscopy (AFM). High speed AFM is of interest for quality control in nanomanufacturing. The cantilevers will be made via polymer molding technology, with the plastic converted via heat treating to silicon carbide. Methods for making defect free cantilevers with geometries that are difficult if not impossible using the standard manufacturing methods will be investigated. The intellectual merit of this project is an increased understanding of application of preceramic polymers for use in making Micro Electro-Mechanical Systems (MEMS). This work will expand the repertoire of cantilever geometries accessible to MEMS researchers. In addition, it will elucidate the role of thermal conversion conditions in controlling the formation of cracks in this class of materials. These results can be applied to any number of applications for preceramic polymers. The broader impact is to enable the wider use of high speed AFM for quality control in nanomanufacturing as well as allowing detailed imaging of chemical and biological dynamical processes. The combined performance advantages of higher resonant frequency (and thus higher scanning speed) and the ability to make cantilevers using inexpensive molding techniques would be of substantial benefit to the nanomanufacturing, microelectronics, and biomedical industries. The demonstration of a method to easily enable manufacturing of silicon carbide based MEMS would have a significant impact on the competitiveness of the microelectronics industry internationally. Finally, students involved in this project will gain exposure to advanced MEMS fabrication techniques, as well as a unique range of expertise at the intersection of electrical and plastics engineering, physics, chemistry, and materials science. In particular, the development of new perspectives and creative problem solving skills is integral to interdisciplinary research of this nature and will foster student success.