SGER: Study soft nanolithography with femtosecond laser irradiations for chemical and gas sensing

SGER：研究用于化学和气体传感的飞秒激光照射软纳米光刻

• 批准号: 0904445
• 负责人: Mengyan Shen
• 金额: --
• 依托单位: University of Massachusetts Lowell
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-01-15 至 2010-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0904445&HistoricalAwards=false
• 关键词: SGER; Study; soft; nanolithography; femtosecond

Abstract0904445Mengyan ShenUniversity of Massahusetts,LowellThis is SGER project on nanosensors.A technique for fabricating nanospikes on different solid surfaces with intense femtosecond laser pulse irradiation was found in 2004. This femtosecond laser irradiation technique is combined with a soft lithography to preliminarily develop a soft nanolithographic manufacturing technique at University of Massachusetts Lowell. The combined technique provides a unique effective tool to design and improve the sensitivity of chemical and gas sensors and greatly reduce the cost. This combined technique can be further used to fabricate surface enhance Raman spectroscopy (SERS) sensors at very low cost; and the sensitivity of a tin oxide gas sensor on silicon nanostructures can be significantly increased. In this research project, nanostructures will be designed using the femtoscond laser pulse irradiation technique to study the nanolithographic manufacturing technique to replicate nanostructures three-dimensionally with polymers at precision better than 5 nm, and fabricate gas (for example, carbon monoxide) and SERS sensor prototypes with the polymer replica at very low cost. Finally, based on the results of this 12-month project, a platform to develop integrated chemical and gas nanosensors, for example, microelectronic nose can be built.

2004年发现了一种利用强飞秒激光脉冲在不同固体表面上制造纳米钉的技术。马萨诸塞州洛厄尔大学将这种飞秒激光照射技术与软光刻相结合，初步开发了软纳米光刻制造技术。这一组合技术为设计和提高化学和气体传感器的灵敏度提供了一种独特有效的工具，并大大降低了成本。这种组合技术可以进一步用于以非常低的成本制造表面增强拉曼光谱（Sers）传感器;并且可以显著增加硅纳米结构上的氧化锡气体传感器的灵敏度。在本研究项目中，将使用飞秒激光脉冲照射技术设计纳米结构，研究纳米光刻制造技术，以优于5 nm的精度用聚合物三维复制纳米结构，并以极低的成本用聚合物复制品制造气体（例如，一氧化碳）和Sers传感器原型。最后，基于这个为期12个月的项目的结果，可以建立一个开发集成化学和气体纳米传感器的平台，例如，微电子鼻。