MRI: Acquisition of an Environmental Scanning Electron Microscope with a 3D Dual Beam Focused Ion Beam

本提案寻求美国国家科学基金会的财政支持，用于购买环境扫描电子显微镜(ESEM)和双光束聚焦离子束(FIB)。这台仪器有两个用途。首先，该仪器将取代早期的ESEM(购买于1994年)，广泛用于支持3所学院9个学术部门的30名教职员工的研究，以及校外合作者的研究；其次，将双光束FIB提供的纳米材料加工灵活性带到密歇根大学纳米电子和设备、生物工程、金属和合金、复合材料、陶瓷和聚合物等领域的广泛研究项目中。收购这一仪器不仅将通过扩大纳米级研究基础设施和其他政府机构和行业来极大地增强用户组合，而且还将成为研究生、本科生、K-12和终身学习水平教育基础设施的组成部分。

0922999DrzalThis proposal seeks financial support from the NSF towards the purchase of an Environmental Scanning Electron Microscope (ESEM) integrated with a Dual Beam FocusedIon Beam (FIB). This instrument will serve two purposes. First, the instrument will replace an early generation ESEM (purchased in 1994) widely used to support research of 30+ faculty members in 9 academic departments in 3 colleges, as well off-campus collaborators and second, to bring the nanoscale materials processing flexibility offered by a dual beam FIB to a wide range of research programs at MSU in the areas of nanoscale electronics and devices, bioengineering, metals and alloys, composites, ceramics, and polymers. The acquisition of this instrument will not only greatly enhance the portfolio of users by expanding the nanoscale research infrastructure and other government agencies and industry, but will also be an integral part of the educational infrastructure at the graduate, undergraduate, K-12 and lifelong learning levels.