MRI: Acquisition of an Environmental Scanning Electron Microscope with a 3D Dual Beam Focused Ion Beam

MRI：使用 3D 双束聚焦离子束获取环境扫描电子显微镜

• 批准号: 0922999
• 负责人: Lawrence Drzal
• 金额: $ 145.36万
• 依托单位: Michigan State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-08-01 至 2011-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0922999&HistoricalAwards=false
• 关键词: MRI; Acquisition; Environmental; Scanning; Electron

0922999DrzalThis proposal seeks financial support from the NSF towards the purchase of an Environmental Scanning Electron Microscope (ESEM) integrated with a Dual Beam FocusedIon Beam (FIB). This instrument will serve two purposes. First, the instrument will replace an early generation ESEM (purchased in 1994) widely used to support research of 30+ faculty members in 9 academic departments in 3 colleges, as well off-campus collaborators and second, to bring the nanoscale materials processing flexibility offered by a dual beam FIB to a wide range of research programs at MSU in the areas of nanoscale electronics and devices, bioengineering, metals and alloys, composites, ceramics, and polymers. The acquisition of this instrument will not only greatly enhance the portfolio of users by expanding the nanoscale research infrastructure and other government agencies and industry, but will also be an integral part of the educational infrastructure at the graduate, undergraduate, K-12 and lifelong learning levels.

0922999 Drzal该提案寻求NSF的财政支持，以购买与双束聚焦离子束（FIB）集成的环境扫描电子显微镜（ESEM）。这一文书有两个目的。首先，该仪器将取代早期的ESEM（1994年购买）广泛用于支持3所大学9个学术部门的30多名教职员工以及校外合作者的研究，其次，将双光束FIB提供的纳米级材料处理灵活性带到密歇根州立大学在纳米级电子和设备，生物工程，金属和合金、复合材料、陶瓷和聚合物。该仪器的收购不仅将通过扩大纳米级研究基础设施和其他政府机构和行业来大大增强用户的投资组合，而且还将成为研究生，本科，K-12和终身学习水平的教育基础设施的组成部分。