MRI: Deveopment of an Apparatus for Deposition of Multi-component Thin Films with Lateral Composition Gradients

MRI：开发具有横向成分梯度的多组分薄膜沉积装置

• 批准号: 0923083
• 负责人: Andrew Gellman
• 金额: $ 63.46万
• 依托单位: Carnegie-Mellon University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2012-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0923083&HistoricalAwards=false
• 关键词: MRI; Deveopment; Apparatus; Deposition; Multi

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).0923083GellmanHigh throughput methodologies have the capacity to accelerate progress in the surface science and materials science of multicomponent materials such as alloys. High throughput methods couple the preparation of libraries of multicomponent materials of many compositions with efficient analysis of the properties of the entire library. Development is proposed of an ultra-high vacuum apparatus housing a device for deposition of thin alloy films with lateral composition gradients. These composition spread alloy films (CSAF) will contain all possible binary or ternary alloys, The UHV apparatus deposition tool will be interfaced with a commercial apparatus for high throughput surface analysis that is being purchased independent of this proposed instrument development effort. It will allow automated, point-by-point analysis of the sample surface using angle resolved x-ray photoemission spectroscopy (XPS) and low energy ion scattering (LIES). These methods will determine the composition of the near surface region, the composition of the topmost atomic layer, and chemical state information of the CSAFs; all resolved as functions of bulk composition or nanoparticle size. The bulk structure of the CSAFs will be determined ex situ using an automated orientation imaging microscope developed at Carnegie Mellon. These bulk and surface analysis methods are sufficient to allow complete local characterization of bulk and surface alloy properties with 1% resolution in composition space on a time scale equivalent to that for preparing a CSAF (~1 day).

该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。高通量方法有能力加速表面科学和多组分材料（如合金）材料科学的进步。高通量方法将多种成分的多组分材料文库的制备与整个文库性质的高效分析结合起来。提出了一种超高真空装置，该装置用于沉积具有横向成分梯度的合金薄膜。这些成分扩散合金薄膜（CSAF）将包含所有可能的二元或三元合金，特高压设备沉积工具将与商业设备接口，用于高通量表面分析，该设备正在购买，独立于该提议的仪器开发工作。它将允许使用角度分辨x射线光电发射光谱（XPS）和低能离子散射（LIES）对样品表面进行自动化逐点分析。这些方法将确定csaf的近表面区域组成、最上层原子层组成和化学状态信息；所有这些都被分解为体成分或纳米颗粒大小的函数。csaf的体结构将使用卡内基梅隆大学开发的自动定向成像显微镜进行非原位测定。这些体和表面分析方法足以在相当于制备CSAF（~1天）的时间尺度上，以1%的成分空间分辨率完成体和表面合金性能的局部表征。