MRI: Deveopment of an Apparatus for Deposition of Multi-component Thin Films with Lateral Composition Gradients

该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。0923083盖尔曼高通量方法有能力加速多组分材料（如合金）的表面科学和材料科学的进步。高通量方法将许多组成的多组分材料库的制备与整个库的性质的有效分析相结合。提出了一种超高真空设备的发展，该设备容纳用于沉积具有横向成分梯度的薄合金膜的装置。这些成分扩散合金膜（CSAF）将包含所有可能的二元或三元合金。UHV设备沉积工具将与用于高通量表面分析的商业设备接口，该商业设备独立于该提议的仪器开发工作而购买。它将允许使用角分辨X射线光电子能谱（XPS）和低能离子散射（LIES）对样品表面进行自动逐点分析。这些方法将确定近表面区域的组成、最顶层原子层的组成和CSAF的化学状态信息;所有这些都作为本体组成或纳米颗粒尺寸的函数来解析。CSAFs的整体结构将使用卡内基梅隆大学开发的自动取向成像显微镜进行非原位测定。这些本体和表面分析方法足以在与制备CSAF（~1天）相当的时间尺度上，以1%的成分空间分辨率对本体和表面合金特性进行完整的局部表征。

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).0923083GellmanHigh throughput methodologies have the capacity to accelerate progress in the surface science and materials science of multicomponent materials such as alloys. High throughput methods couple the preparation of libraries of multicomponent materials of many compositions with efficient analysis of the properties of the entire library. Development is proposed of an ultra-high vacuum apparatus housing a device for deposition of thin alloy films with lateral composition gradients. These composition spread alloy films (CSAF) will contain all possible binary or ternary alloys, The UHV apparatus deposition tool will be interfaced with a commercial apparatus for high throughput surface analysis that is being purchased independent of this proposed instrument development effort. It will allow automated, point-by-point analysis of the sample surface using angle resolved x-ray photoemission spectroscopy (XPS) and low energy ion scattering (LIES). These methods will determine the composition of the near surface region, the composition of the topmost atomic layer, and chemical state information of the CSAFs; all resolved as functions of bulk composition or nanoparticle size. The bulk structure of the CSAFs will be determined ex situ using an automated orientation imaging microscope developed at Carnegie Mellon. These bulk and surface analysis methods are sufficient to allow complete local characterization of bulk and surface alloy properties with 1% resolution in composition space on a time scale equivalent to that for preparing a CSAF (~1 day).