Nanoimprinting with Amorphous Metals

非晶金属纳米压印

• 批准号: 0928227
• 负责人: Jan Schroers
• 金额: $ 36.28万
• 依托单位: Yale University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2013-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0928227&HistoricalAwards=false
• 关键词: Nanoimprinting; Amorphous; Metals

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5). Nanoimprinting promises low cost fabrication of micro- and nano-devices in various fields of application including data processing and storage, photonics, and biomedicine. The success and proliferation of nanoimprinting critically rely on the manufacturing of robust and durable templates. Previous research has been focused on the use of Silicon templates. Due to their brittle nature and limited longevity, this research focuses on amorphous metals with superior mechanical properties over currently used materials in nanoimprinting and the absence of an intrinsic size limitation. Within this proposal the smallest features that can be imprinted into amorphous metals will be evaluated by utilizing the thermoplastic formability of some amorphous metals. Furthermore the unique softening behaviour of amorphous metals, which is utilized for thermoplastic processing will be exploited to develop a versatile toolbox for nanoimprinting. This includes the use of amorphous metals as a mold material and as an imprint material. In addition, the replication of a master mold into amorphous metal daughter and granddaughter molds through thermoplastic forming will be evaluated. This research will develop an enabling and fundamental nanomanufacturing process for a wide range of applications including data storage, biotechnology, semiconductor ICs, solar cells, and catalysts. Furthermore, characterizing of the fundamental deformation behavior of metallic glasses will generate new cutting-edge knowledge in nanopatterning. Thus, the success of the proposed research will aid U.S.'s competitiveness in nanotechnology, benefit U.S industry, and will potentially have significant economic impact. The research will expose and train graduate and undergraduate students to amorphous metals and their usage in the new technology area of nanomanufacturing.

该奖项是根据2009年《美国复苏与再投资法》（公法111-5）资助的。纳米印刷有望在各个应用领域（包括数据处理和存储，光子学和生物医学）在各个应用领域的微型和纳米设备的低成本制造。纳米印刷的成功和增殖在很大程度上取决于稳健和耐用模板的制造。先前的研究集中在使用硅模板上。由于其脆性和寿命有限，这项研究的重点是具有优于纳米印刷中使用的材料的优质机械性能的无定形金属，并且没有内在的尺寸限制。在此提案中，可以通过利用某些无定形金属的热塑性形成性来评估可以将最小的特征印记到无定形金属中。此外，将利用用于热塑性加工的无定形金属的独特软化行为，以开发用于纳米印刷的多功能工具箱。这包括将无定形金属用作模具材料和烙印材料。此外，将评估将主模具复制到无定形金属女儿和孙女模具中，并通过热塑性形成评估。 这项研究将开发一个有能力和基本的纳米制造过程，用于广泛的应用，包括数据存储，生物技术，半导体IC，太阳能电池和催化剂。此外，表征金属眼镜的基本变形行为将在纳米图案中产生新的尖端知识。因此，拟议研究的成功将有助于美国在纳米技术，使美国产业受益，并有可能产生重大的经济影响。这项研究将暴露并培训毕业生和本科生在纳米制造的新技术领域中的无定形金属及其使用。