SBIR Phase I: Development of Scanning Near Field Ultrasound Holography with Integrated Electronic Detection for Sub-Surface Nanomechanical Imaging

SBIR 第一阶段：开发具有集成电子检测功能的扫描近场超声全息术，用于亚表面纳米机械成像

• 批准号: 0945959
• 负责人: Arvind Srivastava
• 金额: $ 15万
• 依托单位: NanoSonix, Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-01-01 至 2010-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0945959&HistoricalAwards=false
• 关键词: SBIR; Phase; Development; Scanning; Near

This Small Business Innovation Research Phase I project will demonstrate the feasibility of using MOSFET-embedded cantilevers for integrated electronic detection of cantilever deflection for scanning near-field ultrasound holography (SNFUH). This synergistic combination of the scanning probe microscopy (SPM) platform and scanning near-field ultrasound holography will provide nanoscale lateral spatial resolution, and has the potential for comparable depth resolution. The performance of SNFUH has been constrained by its implementation as part of a conventional single-cantilever SPM platform, where the low frequency response (~600 kHz) optical detector limited achievable depth resolution and throughput. We propose to overcome this major limitation to the conventional SPM platform by developing an all-electronic feedback approach to enable parallel scanning and high resolution SNFUH imaging. The core of the proposed work lies in the "out-of-the-box" innovation of an all-electronic MOSFET-embedded microcantilever that can be fabricated by standard semiconductor techniques. Our preliminary design has shown excellent sensitivity and a usable bandwidth of ~100MHz. This Phase I work will demonstrate the feasibility of high throughput sub-surface scanning. Phase II research will focus on developing a parallel array of MOSFET-embedded microcantilevers. The broader impact/commercial potential of this project will be the development of a nanoscale imaging tool which will be immediately applicable in the semiconductor industry for failure analysis and process development, and which will find utility in probing the interactions of engineered nanomaterials in biological systems. The tool will combine the ultrahigh spatial resolution of a near field technique (atomic force microscopy or AFM) with the ability to image defects inside optically dense materials (both soft and hard) using ultrasound, non-destructively and in a conceptually simple fashion. The project efforts will lead directly to the development of a highly parallel array of MOSFET-embedded cantilever probes coupled with all-electronic feedback control for high-resolution and high-throughput SNFUH sub-surface imaging. Furthermore, the method of integrated electronic detection which we will develop will also find application in existing AFM platforms, lowering their cost and simplifying their use.

这个小型企业创新研究第一阶段项目将证明使用嵌入式悬臂梁的扫描近场超声全息（SNFUH）的悬臂偏转集成电子检测的可行性。 这种扫描探针显微镜（SPM）平台和扫描近场超声全息的协同组合将提供纳米级的横向空间分辨率，并具有可比的深度分辨率的潜力。 SNFUH的性能受到其作为传统单悬臂SPM平台的一部分的实现的限制，其中低频响应（~600 kHz）光学检测器限制了可实现的深度分辨率和吞吐量。 我们建议通过开发一种全电子反馈方法来克服传统SPM平台的这一主要限制，以实现并行扫描和高分辨率SNFUH成像。所提出的工作的核心在于“开箱即用”的创新，可以通过标准半导体技术制造的全电子MEMS嵌入式微悬臂梁。 我们的初步设计已经显示出出色的灵敏度和可用带宽~ 100 MHz。第一阶段的工作将证明高通量次表面扫描的可行性。 第二阶段的研究将集中在开发一个并行阵列的嵌入式微悬臂梁。该项目更广泛的影响/商业潜力将是开发一种纳米级成像工具，该工具将立即适用于半导体行业的故障分析和工艺开发，并将在探测生物系统中工程纳米材料的相互作用中找到实用性。 该工具将结合联合收割机的近场技术（原子力显微镜或AFM）的空间分辨率与使用超声波，非破坏性地和概念上简单的方式成像光学致密材料（软和硬）内的缺陷的能力。该项目的努力将直接导致开发一个高度平行阵列的嵌入式悬臂梁探针，再加上全电子反馈控制的高分辨率和高通量SNFUH次表面成像。此外，我们将开发的集成电子检测方法也将应用于现有的AFM平台，降低其成本并简化其使用。