FOR 1713: Sensoric Micro- and Nanosystems

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Beside the ongoing downscaling trend in the semiconductor industry, based on Moore's Law, there exists another trend, called More than Moore, which describes the integration of different technologies and functionalities. This approach enables miniaturised systems to interact with the environment, beside communication, signal and information processing. These systems contain digital and analogue electronics, sensors and actuators, passive devices, RF devices, HV circuits or biotechnology. By miniaturising components and using nanotechnologies it is possible to realise new or improved functionalities. Smart Systems Integration is following this trend towards miniaturised multifunctional devices and systems. Smart Systems are able to realise complex functions within smallest space by interaction of powerful heterogeneous components. These systems are smart, reliable and cost efficient. They are adaptive, energy autonomous and they communicate among one another and with the environment. Currently, Germany and Europe belong to the global players in microsystem technology and Smart System Integration. Smart Systems of the future demand the integration of devices and components fabricated by state of the art micro- and nanotechnologies, for staying competitive at the international markets. Examples for new sensor principles based on nanostructures are nanomechanical systems (NEMS) or the usage of solid-state-components as sensoric converters. These approaches are the base for intelligent systems of the future, but they are far away to be realised. The Research Unit aims at such trendsetting micro- and nanotechnological concepts that can be assigned to the trend 'More than Moore'. The involved research institutions can rely on broad experience in design, fabrication, packaging and characterisation of microsystems to tackle the nano-scale. Furthermore, the Smart System Integration is a main research interest of the Chemnitz University of Technology and the Fraunhofer Institute for Electronic Nano Systems ENAS.