MRI-R2: Acquisition of Conformal-Oxide Processing Module for Microfabrication Central User Facility

MRI-R2：为微加工中央用户设施采购保形氧化物处理模块

• 批准号: 0958785
• 负责人: Rashid Zia
• 金额: $ 45万
• 依托单位: Brown University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-03-01 至 2012-02-29
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0958785&HistoricalAwards=false
• 关键词: MRI; R2; Acquisition; Conformal; Oxide

"This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)" Objective: The objective of this research is to enable development of nanopatterned conformal oxides for device applications. The approach is to acquire a processing module comprised of complementary inductively-coupled plasma (ICP) etch and atomic-layer deposition (ALD) tools for the Brown Microelectronics Central User Facility. Intellectual Merit: This equipment cluster will enable the fabrication of nanopatterned conformal oxides for cutting-edge applications in electronic, fluidic, photonic, and implantable devices. Specifically, the proposed equipment will help researchers: (1) deposit high-?Û dielectrics for nanoelectronic devices; (2) control the dimensions and surface chemistry of nanofluidic channels; (3) pattern and protect optically active materials, including luminescent rare-earth oxides, for light emitters and detectors; and (4) encapsulate implants with bio-compatible coatings that prevent infection and promote tissue growth.Broader impacts: Located in a central user facility with ongoing technical and administrative support, this equipment will constitute a linchpin of the Brown University infrastructure for research training in nanoscale science and engineering for years to come. Housed in a publicly accessible cleanroom, this equipment will be made available to researchers from many university departments, including Engineering, Physics, Chemistry, Biology and Medicine, as well as outside users from local industry and academic institutions via the Materials Research Facilities Network. Furthermore, this program will be enriched by established connections with outreach through the NSF sponsored GK-12 ¡§Physical Processes in the Environment¡¨ program in the Providence Public School system and the collaborative REU program offered by the Brown Materials Research Science and Engineering Center (MRSEC) and the Leadership Alliance.

“该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的”目标：本研究的目标是开发用于设备应用的纳米图案保形氧化物。该方法是为布朗微电子中心用户设施获得一个由互补电感耦合等离子体（ICP）蚀刻和原子层沉积（ALD）工具组成的处理模块。智力优势：该设备集群将使纳米图案保形氧化物的制造成为电子，流体，光子和可植入设备的尖端应用。具体来说，提议的设备将帮助研究人员：(1)沉积高-？Û纳米电子器件的电介质；(2)控制纳米流体通道的尺寸和表面化学性质；(3)设计和保护光活性材料，包括发光稀土氧化物，用于发射器和探测器；(4)用生物相容性涂层封装植入物，以防止感染并促进组织生长。更广泛的影响：该设备位于中心用户设施中，具有持续的技术和管理支持，将成为布朗大学未来几年纳米科学和工程研究培训基础设施的关键。该设备位于一个可公开访问的洁净室中，将通过材料研究设施网络提供给许多大学院系的研究人员，包括工程、物理、化学、生物和医学，以及来自当地工业和学术机构的外部用户。此外，通过美国国家科学基金会赞助的普罗维登斯公立学校系统的“环境中的物理过程”项目，以及布朗材料研究科学与工程中心（MRSEC）和领导力联盟提供的REU合作项目，该项目将得到丰富。