MRI-R2: Acquisition of a Structural Dynamics and Surface Characterization System for Research and Educational Activities on Micro-scale Structures and Devices

MRI-R2：获取结构动力学和表面表征系统，用于微型结构和设备的研究和教育活动

• 批准号: 0960315
• 负责人: Lorenzo Valdevit
• 金额: $ 44.94万
• 依托单位: University of California-Irvine
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-04-01 至 2011-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0960315&HistoricalAwards=false
• 关键词: MRI; R2; Acquisition; Structural; Dynamics

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).The objective of this Major Research Instrumentation (MRI-R2) award is to acquire a state-of-the-art fully-integrated Micro Systems Analyzer (Polytec MSA-500). This tool allows quantitative three-dimensional measurements of the vibration modes of structures and devices ranging from centimeter down to nanometer scale, including micro and nanoelectromechanical systems (MEMS/NEMS), micro-fluids and biological systems. Measuring and quantifying the response of small-scale materials and structures to applied dynamical loads is essential in a variety of research fields. Such experiments are often complicated by a number of stringent requirements, such as non-contact technology, quick scanning of the entire surface of the object, very high displacement resolution, and ability to characterize samples immersed in aqueous solutions. This Micro Systems Analyzer meets all these requirements and will be transformational in a number of existing projects, ranging from the development and characterization of MEMS resonant devices (e.g. gyroscopes and micro-load cells) and bio-MEMS platforms, to fundamental fluid mechanics research on jet breakup and micro-fluidic systems, and physiological studies of the human ear.This Micro Systems Analyzer will critically impact nearly every research endeavor that studies or utilizes microstructures or microdevices. By complementing a fully equipped clean room, a state-of-the-art microscopy center and a modern materials characterization lab, this tool will provide the University of California, Irvine with a unique opportunity to propel itself to the forefront of micro and nano systems research. The acquired instrument will be made available to a variety of external users from UC sister campuses, private educational institutions and local businesses. Further, this Micro Systems Analyzer will open a variety of exciting educational opportunities: besides being readily integrated into existing courses, it will enrich undergraduate research opportunities through a variety of established initiatives. Most importantly, it will play a substantial role in training the next generation of researchers.

该奖项由2009年美国复苏和再投资法案（Public Law 111-5）资助。该主要研究仪器（MRI-R2）奖项的目标是获得最先进的全集成微系统分析仪（Polytec MSA-500）。该工具允许对结构和设备的振动模式进行定量三维测量，范围从厘米到纳米尺度，包括微和纳机电系统（MEMS/NEMS），微流体和生物系统。测量和量化小尺度材料和结构对所施加的动态载荷的响应在各种研究领域中是必不可少的。这些实验通常因一些严格的要求而变得复杂，例如非接触技术，物体整个表面的快速扫描，非常高的位移分辨率以及表征浸入水溶液中的样品的能力。这种微系统分析仪满足所有这些要求，并将在现有的项目，从MEMS谐振器件的开发和表征，（例如陀螺仪和微测力传感器）和生物MEMS平台，到射流破碎和微流体系统的基础流体力学研究，这款微系统分析仪将对几乎所有研究或利用微结构或微器件的研究奋进产生重大影响。通过补充设备齐全的洁净室，最先进的显微镜中心和现代材料表征实验室，该工具将为加州大学欧文分校提供一个独特的机会，将自己推向微米和纳米系统研究的前沿。收购的仪器将提供给来自UC姐妹校区，私立教育机构和当地企业的各种外部用户。此外，这种微系统分析仪将打开各种令人兴奋的教育机会：除了容易集成到现有的课程，它将通过各种既定的举措丰富本科生的研究机会。最重要的是，它将在培养下一代研究人员方面发挥重要作用。