SBIR Phase I: Nanometrology using Low-Cost, High Performance and Long Working Range Super-Homodyne Interferometer

SBIR 第一阶段：使用低成本、高性能和长工作范围的超零差干涉仪进行纳米计量

基本信息

批准号：
1013518
负责人：
Benjamin Dingel
金额：
$ 15万
依托单位：
Nasfine Photonics, Inc.
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2010
资助国家：
美国
起止时间：
2010-07-01 至 2011-06-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1013518&HistoricalAwards=false
关键词：
SBIR Phase Nanometrology using Low

项目摘要

This Small Business Innovation Research (SBIR) Phase I project aims to investigate the feasibility of an innovative, super-homodyne interferometer for high-precision distance measurement with long dynamic range (more than two orders larger than the fundamental wavelength) and high resolution (less than one half-wavelength). If successful, this would represent the longest working distance of any reported homodyne-based interferometer design. The new device is referred to as a super-homodyne interferometer (SHI). The innovation represents a fundamental yet simple modification of existing systems, with the same basic structure as a homodyne interferometer, but exhibiting the superior performance of heterodyne interferometers. In Phase 1, we will focus on the design, prototyping, testing, and measurement of the super-homodyne interferometer.The broader impact/commercial potential of this project will extend to a number of markets and applications. The interferometer is one of the most fundamental tools in measurement science and nanotechnology. Interferometers set the standard for precise distance measurement and are extensively used in the areas of semiconductor fabrication, robotics, precision sensing, machine tools, vibrometry, laser-Doppler velocimetry, and laser microscopy. The successful introduction of SHI products will represent a major engineering advance with a huge impact on measurement science and basic and applied research and development.

这项小型企业创新研究（SBIR）I阶段项目旨在调查创新的，超高的干涉仪对高精度距离测量值的可行性，具有长时间的动态范围（大于基本波长大于基本波长）和高分辨率（小于一半波长）。如果成功，这将代表任何报告的基于同性恋的干涉仪设计中最长的工作距离。新设备称为超霍迪尼干涉仪（SHI）。该创新代表了对现有系统的基本且简单的修改，其基本结构与同性恋干涉仪相同，但表现出了异差干涉仪的出色性能。在第1阶段，我们将重点介绍超级摩托学干涉仪的设计，原型制作，测试和测量。该项目的更广泛的影响/商业潜力将扩展到许多市场和应用。干涉仪是测量科学和纳米技术中最基本的工具之一。干涉仪设定了精确距离测量的标准，并广泛用于半导体制造，机器人技术，精度感应，机床，机器，振动法，激光多普勒速度和激光显微镜。成功引入SHI产品将代表一个重大的工程进步，对测量科学以及基本和应用研究与开发产生巨大影响。