SBIR Phase I: Economically and Environmentally Responsible Synthesis of Silane Gas for Use in High-Purity Silicon Production

该SBIR第一阶段项目将开发一种利用硅、氢和等离子弧直接合成硅烷的工艺。该项目的更广泛/商业影响将包括可能消除有害硅烷气体的运输，并降低硅烷气体的生产成本。 这两项成果都将对各种电子设备、计算设备、太阳能发电设备和其他重要产品的制造产生广泛影响。

This SBIR Phase I project will develop a process for direct synthesis of silane utilizing silicon, hydrogen and a plasma arc.The broader/commercial impact of the project will include the potential elimination of shipping of hazardous silane gas, and decreased production cost for silane gas. Both of these outcomes will have broad impact across the manufacturing of a wide variety of electronic equipment, computing equipment, solar power generation equipment, and other important products.