SBIR Phase I: Economically and Environmentally Responsible Synthesis of Silane Gas for Use in High-Purity Silicon Production

SBIR 第一阶段：经济且环保地合成用于高纯硅生产的硅烷气体

• 批准号: 1014162
• 负责人: Thomas Liu
• 金额: $ 15万
• 依托单位: ElectroDynamic Applications, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-07-01 至 2010-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1014162&HistoricalAwards=false
• 关键词: SBIR; Phase; Economically; Environmentally; Responsible

This SBIR Phase I project will develop a process for direct synthesis of silane utilizing silicon, hydrogen and a plasma arc.The broader/commercial impact of the project will include the potential elimination of shipping of hazardous silane gas, and decreased production cost for silane gas. Both of these outcomes will have broad impact across the manufacturing of a wide variety of electronic equipment, computing equipment, solar power generation equipment, and other important products.

该SBIR第一阶段项目将开发一种利用硅、氢和等离子弧直接合成硅烷的工艺。该项目的更广泛/商业影响将包括可能消除有害硅烷气体的运输，并降低硅烷气体的生产成本。 这两个结果将对各种电子设备、计算设备、太阳能发电设备和其他重要产品的制造产生广泛影响。