MEMS Reconfigurable Subwavelength Metallic Slits for Broadband Terahertz Modulation

该项目旨在通过首次利用MEMS可重构亚波长金属狭缝，开发和实现一种新型太赫兹调制器。这种太赫兹调制器利用电磁波通过多层亚波长金属狭缝的低损耗和宽带传输的优势，提供前所未有的调制带宽，至少比现有技术高十倍。此外，这种太赫兹调制器在具有竞争力的调制速度和调制电压下工作时，提供高达100%的调制指数。虽然理论研究提供了对电磁波与多层亚波长金属狭缝相互作用的深刻理解，但实验工作为开发实现完全集成的太赫兹调制器的适当设计和制造工艺提供了直观的见解。将探讨各种几何形状，以减轻调制电压、调制带宽、调制指数、调制速度和调制器可靠性之间的权衡。这项研究的结果将使太赫兹空间波束形成和开发基于压缩感知的高性能主动和被动太赫兹成像系统成为可能。综合教育活动将培养研究生和本科生的跨学科研究能力。

This project is aimed to develop and implement a new type of terahertz modulator by exploiting, for the first time, MEMS reconfigurable subwavelength metallic slits. This terahertz modulator takes advantage of low loss and broadband transmission of electromagnetic waves through multiple layers of subwavelength metallic slits to offer unprecedented modulation bandwidths of at least ten times higher than the prior art. Moreover, this terahertz modulator offers up to 100 percent modulation index while operating at competitive modulation speeds and modulation voltages compared to the state-of-the art. While theoretical investigations provide a deep understanding of electromagnetic wave interaction with multi-layered subwavelength metallic slits, the experimental effort provides an intuitive insight to develop proper designs and fabrication processes for realizing a fully integrated terahertz modulator. Various geometries will be explored to mitigate the tradeoff between the modulation voltage, modulation bandwidth, modulation index, modulation speed, and modulator reliability. The outcome of this research will enable terahertz spatial beam forming and developing high-performance active and passive terahertz imaging systems based on compressive sensing. The integrated education activities will train graduate and undergraduate students on interdisciplinary research.