Multi-axis Parallel-Kinematic Motion Systems with a Large Dynamic Range

该奖项的目标是创建一种机器设计方法，在基于弯曲的多轴运动系统中同时实现大运动范围(10毫米)和纳米精度。研究方法将包括使用基于约束的设计方法来构思新颖的并联运动学物理结构，该结构内在地考虑了与柔性轴承、执行器和传感器相关的几何约束和限制。将采用双绕组音圈驱动和互补传感方面的创新，以克服这些组件中传统的信噪比和失真比限制。将研究和实施反馈控制方案，以解决与大动态范围相关的独特挑战，如非线性行为、非并置传感和驱动以及噪声和干扰敏感性。为了满足柔性运动系统的目标性能，将对物理系统和控制系统进行同步优化。尽管现有的柔性运动系统具有高精度的固有能力，但其较小的运动范围(每轴约100微米)限制了扫描探针显微镜、纳米测量和直写光刻等应用。拟议的大范围、高精度运动系统，当被整合到扫描探针显微镜技术中时，将能够在保持纳米图像分辨率的同时，实现大范围(10x10毫米)的无缝成像，而不会出现任何拼接错误。这将扩大这种成像技术在实际工业环境中的使用，例如半导体、LCD平板和磁盘驱动器制造行业的检查和过程控制。拟议的运动系统还将通过创建具有纳米不确定度的坐标测量机来服务于纳米计量学领域。该项目的教育外展将通过工程会议上提供的关于高精度运动系统的专业教程、研究生和本科生水平的课程开发以及在当地科学博物馆为K-12儿童举办的新展览来进行。

The objective of this award is to create a machine design methodology that simultaneously enables large motion range (10 millimeter) and nanometric precision in multi-axis, flexure-based motion systems. The research approach will include the use of constraint-based design methods to conceive novel parallel-kinematic physical architectures that inherently take into account the geometric constraints and limitations associated with flexure bearings, actuators and sensors. Innovations in dual-winding voice coil actuation and complementary sensing will be employed to overcome the traditional signal to noise and distortion ratio limits in these components. Feedback control schemes that address the unique challenges associated with large dynamic range, such as non-linear behavior, non-collocated sensing and actuation, and noise and disturbance sensitivity, will be investigated and implemented. A concurrent optimization of the physical and control systems will be conducted to meet the targeted performance in flexure-based motion systems.Even though existing flexure-based motion systems are inherently capable of high precision, their small motion range (approximately 100 microns per axis) restricts several applications including scanning probe microscopy, nanometrology and direct-write lithography. The proposed large-range, high-precision motion systems, when incorporated within scanning probe microscopy techniques, will enable seamless imaging of large areas (10 by 10 millimeters) without any stitching errors, while maintaining nanometric image resolution. This will extend the use of such imaging techniques in practical industrial settings, for example, inspection and process control in semiconductor, LCD flat-panel, and magnetic disk-drive fabrication industries. The proposed motion systems will also serve the field of nanometrology by enabling the creation of coordinate measuring machines with nanometric uncertainty. The educational outreach in this project will be carried out via professional tutorials on high precision motion systems offered at engineering conferences, graduate and undergraduate level curriculum development, and a new exhibit at the local science museum for K-12 children.