Anti-Shock Scheme Based on Dual-Membrane Structure in Capacitive MEMS Sensors and Actuators

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The objective of this program is to develop a scheme based ona novel dual-membrane-structure (DMS) configuration to mitigate mechanical shocks for MEMS sensors and actuators,which constitutes an outstanding problem in MEMS research. For example, in order to maximize the sensitivity of an existing MEMSmicrophone, the distance between the diaphragm and backplate needsto be small and the membrane should be thin, rendering the deviceparticularly vulnerable to external shocks. The DMS configuration represents an intrinsic, self-sustained, practically implementable control scheme to counter mechanical shocks. A comprehensive theoretical/computational/experimental paradigm based on MEMSphysics, nonlinear and synchronization analyses will be establishedto validate the proposed approach.The intellectual merit is that the strongly interdisciplinary research will result in novel impact-protected MEMS devices with nonlinear control. The research will lead to a new class of MEMS sensors and actuators with ultra-reliable performances.The theoretical/computational/experimental paradigm required to realize the proposed research is transformative to developingMEMS devices in biomedical, industrial, defense and homeland-security applications. The broader impacts are (1) to advance significantly understanding of the fundamental dynamics of small-scale systems, (2) to enable high-performance applications of robust MEMS devices in a broad range of fields, and (3) to create an exciting environment for graduate and undergraduate students in terms of interdisciplinary awareness and skills.