Collaborative Research: Processing and Properties of Cellulose Films for MEMS Applications

合作研究：用于 MEMS 应用的纤维素薄膜的加工和性能

• 批准号: 1131633
• 负责人: Virginia Davis
• 金额: $ 28.7万
• 依托单位: Auburn University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-01 至 2015-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1131633&HistoricalAwards=false
• 关键词: Collaborative; Research; Processing; Properties; Cellulose

The objective of this grant is to investigate the feasibility of cellulose nanocrystals as an alternative to silicon for microelectromechanical systems (MEMS). The structure, mechanical properties, surface chemistry, and ability to self-assemble into well defined architectures over multiple scales make cellulose nanocrystals particularly attractive building blocks for advanced materials. In this research, cellulose nanocrystals with controlled size distributions and surface chemistries will be processed to form dry films and fabricated into devices using conventional MEMS fabrication techniques such as lithography and etching. Finally, the properties of the resulting devices will be characterized to yield an interrelation between the cellulose nanocrystal MEMS device properties, the cellulose nanocrystal dispersion microstructure, and film processing conditions. If successful, this research will enable renewable cellulose materials to be used as an inexpensive alternative to the high-cost electronic grade silicon, which is currently the industry standard for advanced sensor platforms. Results of this research have the potential to transform the MEMS industry, as well as other silicon based technologies. This would have considerable economic impact; Yole Developpement projects the MEMS industry will exceed $13 billion in 2012. Even if the full potential of this research is not realized, it will provide fundamental insight into the processing of nanocylinders for advanced materials applications. The research will also enhance a strong collaboration between Chemical Engineering faculty at Auburn University and Clemson University. The research will contribute to the education and training of two Ph. D. students, one post doctoral researcher, and four undergraduate researchers. Graduate student rotations in each of the PIs laboratory will provide a diverse perspective and training for the advanced materials workforce. The research team will also engage in outreach activities to foster the development of the next generation of scientists and engineers.

这项拨款的目的是研究纤维素纳米晶体作为微机电系统（MEMS）硅的替代品的可行性。纤维素纳米晶体的结构、机械性能、表面化学以及在多个尺度上自组装成明确结构的能力，使其成为先进材料的特别有吸引力的组成部分。在这项研究中，具有可控尺寸分布和表面化学性质的纤维素纳米晶体将被加工成干膜，并使用传统的MEMS制造技术（如光刻和蚀刻）制造成器件。最后，将对所得器件的性能进行表征，以得出纤维素纳米晶MEMS器件性能、纤维素纳米晶分散结构和薄膜加工条件之间的相互关系。如果成功，这项研究将使可再生纤维素材料成为高成本电子级硅的廉价替代品，硅是目前先进传感器平台的行业标准。这项研究的结果有可能改变MEMS行业，以及其他硅基技术。这将产生相当大的经济影响；Yole development预计MEMS产业在2012年将超过130亿美元。即使这项研究的全部潜力没有实现，它也将为先进材料应用的纳米圆柱体的加工提供基本的见解。这项研究还将加强奥本大学化学工程学院和克莱姆森大学之间的紧密合作。该研究将用于培养2名博士生、1名博士后研究员和4名本科生研究员。每个pi实验室的研究生轮岗将为先进材料工作人员提供多样化的视角和培训。研究小组还将开展外展活动，以促进下一代科学家和工程师的发展。