MRI: Acquisition of an Electron Beam Lithography System for the NCSU Nanofabrication Facility

目的：这项提议是为了一个新的电子束光刻和成像系统，以增强北卡罗来纳州立大学的纳米制造能力，以满足广泛的应用和用户。智力优势：这项收购计划有望为纳米电子学、光电子学、纳米流体生物传感器和纳米间隙传感器带来高性能的纳米器件。电子束光刻系统和成像系统将有能力在6英寸的晶片上达到10纳米的分辨率。PI管理微电子中心，该新工具将位于该中心。新工具将得到广泛应用，40多名教职员工将积极参与这一工具将使之成为可能的研究；这份提案中描述了20个具有重大影响的具体研究项目。这里提出的这一新仪器将在各种技术领域催化和加速纳米科学的跨学科研究。广泛的影响：所要求的仪器将服务于北卡罗来纳州的4所学院和10个系，因此预计将服务于大量的教职员工和他们各自的学生。所要求的系统支持的研究将对北卡罗来纳州立大学的研究生和本科生研究和培训产生重大影响，该仪器将被整合到几个实验室课程中。外展活动包括与当地HBCU邵逸夫大学的合作，以及为少数族裔学生提供暑期实习，提供实践教育和研究培训。

Objective: This proposal is for a new electron beam lithography and imaging system to augment the nanoscale fabrication capabilities at NC State University for a wide range of applications and users. Intellectual Merit: This acquisition proposal is expected to lead to high-performance nano-devices for nanoelectronics, opto-electronics, nanofluidic bio-sensors, and nanogap sensors. The electron beam lithography system and imaging system will have the capability to reach the resolutions down to 10 nm on six inch wafers. The PI manages the Microelectronics center, where this new tool will be located. The new tool will be widely used, with over 40 faculty members actively involved in research that will be enabled by this tool; 20 specific research projects of high impact have been described in this proposal. This new instrument proposed here will catalyze and accelerate interdisciplinary research in nanoscience on a variety of technical fields.Broader Impacts: The requested instrument will serve 4 colleges and 10 departments at NC State and hence is expected to serve a large population of faculty and their respective students. The research enabled by the requested system will have significant impact in both graduate and undergraduate research and training at NC State and the instrument will be integrated into several lab courses. Outreach activities include involvement with Shaw University, a local HBCU, and summer internships for minority students providing getting hands-on education and research training.