MRI: Acquisition of an Electron Beam Lithography System for the NCSU Nanofabrication Facility
MRI:为 NCSU 纳米加工设施购置电子束光刻系统
基本信息
- 批准号:1229182
- 负责人:
- 金额:$ 96万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Standard Grant
- 财政年份:2012
- 资助国家:美国
- 起止时间:2012-09-01 至 2015-08-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Objective: This proposal is for a new electron beam lithography and imaging system to augment the nanoscale fabrication capabilities at NC State University for a wide range of applications and users. Intellectual Merit: This acquisition proposal is expected to lead to high-performance nano-devices for nanoelectronics, opto-electronics, nanofluidic bio-sensors, and nanogap sensors. The electron beam lithography system and imaging system will have the capability to reach the resolutions down to 10 nm on six inch wafers. The PI manages the Microelectronics center, where this new tool will be located. The new tool will be widely used, with over 40 faculty members actively involved in research that will be enabled by this tool; 20 specific research projects of high impact have been described in this proposal. This new instrument proposed here will catalyze and accelerate interdisciplinary research in nanoscience on a variety of technical fields.Broader Impacts: The requested instrument will serve 4 colleges and 10 departments at NC State and hence is expected to serve a large population of faculty and their respective students. The research enabled by the requested system will have significant impact in both graduate and undergraduate research and training at NC State and the instrument will be integrated into several lab courses. Outreach activities include involvement with Shaw University, a local HBCU, and summer internships for minority students providing getting hands-on education and research training.
目的:本提案旨在开发一种新的电子束光刻和成像系统,以增强北卡罗来纳州立大学的纳米级制造能力,以实现更广泛的应用和用户。知识价值:该收购提案有望为纳米电子学、光电子学、纳米流体生物传感器和纳米间隙传感器带来高性能纳米器件。电子束光刻系统和成像系统将有能力在6英寸晶圆上达到10纳米的分辨率。PI管理微电子中心,这个新工具将位于该中心。新工具将被广泛使用,超过40名教职员工积极参与研究,这将使该工具成为可能;本提案描述了20个具有重要影响的具体研究项目。在这里提出的这种新仪器将催化和加速纳米科学在各种技术领域的跨学科研究。更广泛的影响:所要求的仪器将服务于北卡罗莱纳州的4个学院和10个部门,因此预计将服务于大量的教师和他们各自的学生。该系统将对北卡罗来纳州立大学研究生和本科生的研究和培训产生重大影响,该仪器将被整合到几个实验课程中。拓展活动包括与当地的HBCU邵逸夫大学(Shaw University)合作,为少数民族学生提供暑期实习机会,提供实践教育和研究培训。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
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Mehmet Ozturk其他文献
The usefulness of quantitatively assessing temporomandibular joint disk stiffness with shear wave elastography in adolescents with bruxism
- DOI:
10.1016/j.oooo.2022.06.008 - 发表时间:
2022-10-01 - 期刊:
- 影响因子:
- 作者:
Mehmet Ozturk;Emire Aybüke Erdur;Nurullah Dağ;Ömer Erdur - 通讯作者:
Ömer Erdur
The Factors Affecting Wind Erosion in Southern Utah
影响犹他州南部风蚀的因素
- DOI:
- 发表时间:
2019 - 期刊:
- 影响因子:0
- 作者:
Mehmet Ozturk - 通讯作者:
Mehmet Ozturk
Molecular Pathogenesis of Liver Cancer
- DOI:
10.1007/s12029-017-9957-2 - 发表时间:
2017-07-17 - 期刊:
- 影响因子:1.600
- 作者:
Mehmet Ozturk;Tugce Batur;Umut Ekin;Aybike Erdogan;Evin İscan;Umur Keles;Ozden Oz;Cigdem Ozen - 通讯作者:
Cigdem Ozen
Selective G to T mutations of p53 gene in hepatocellular carcinoma from southern Africa
来自南非的肝细胞癌中 p53 基因的选择性 G 到 T 突变
- DOI:
10.1038/350429a0 - 发表时间:
1991-04-04 - 期刊:
- 影响因子:48.500
- 作者:
Brigitte Bressac;Michael Kew;Jack Wands;Mehmet Ozturk - 通讯作者:
Mehmet Ozturk
Evaluation of the results of laser endopyelotomy with two different technique in ureteropelvic junction obstruction
- DOI:
10.1016/j.jpurol.2021.01.035 - 发表时间:
2021-06-01 - 期刊:
- 影响因子:
- 作者:
Haluk Sen;Omer Bayrak;Ali Erdem Yilmaz;Omer Turgut;Mehmet Ozturk;Sakip Erturhan;Ilker Seckiner - 通讯作者:
Ilker Seckiner
Mehmet Ozturk的其他文献
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{{ truncateString('Mehmet Ozturk', 18)}}的其他基金
PFI-TT: Flexible Electronic Devices for Harvesting Body Heat toward Self-Powered Wearable Health Monitoring
PFI-TT:用于收集体热以实现自供电可穿戴健康监测的柔性电子设备
- 批准号:
2044677 - 财政年份:2021
- 资助金额:
$ 96万 - 项目类别:
Standard Grant
REU Site: Research Experiences for Undergraduates in the Department of Electrical and Computer Engineering at North Carolina State University
REU 网站:北卡罗来纳州立大学电气与计算机工程系本科生研究经历
- 批准号:
0649100 - 财政年份:2007
- 资助金额:
$ 96万 - 项目类别:
Continuing Grant
A Novel Laboratory Based Introduction to Electrical and Computer Engineering for Sophomores
面向大二学生的基于实验室的新型电气与计算机工程简介
- 批准号:
0127348 - 财政年份:2002
- 资助金额:
$ 96万 - 项目类别:
Continuing Grant
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