NSF MRI Track 2: Acquisition of an Electron Beam Lithography and Imaging System for Research, Education, and Training

该MRI提案寻求获得电子束光刻（EBL）系统，以支持新墨西哥大学（UNM）及其周边地区的教育和研究。新墨西哥大学是卡内基R1，少数民族服务机构，其学生群体约有50%是西班牙裔，12%是美洲印第安人，该提案利用这种独特的环境来培养历史上代表性不足的背景的学生在EBL及其申请中。EBL系统将安装在高科技材料中心（CHTM），该中心在光子学和半导体研究方面拥有40年的领先记录，为广泛的内部和外部研究人员提供服务。智力优势：纳米制造设备是众多科学和工程领域的核心，从光子学到生物化学和量子技术。EBL是纳米制造的主要工具，经常获得高质量的EBL是许多纳米科学研究项目的必要条件。在新墨西哥大学，超过15个多学科（如电气、机械、化学工程、物理和化学）的pi使用EBL。在量子技术方面，新墨西哥大学的研究人员使用ebl定义的设备来建立对量子设备的潜力、可扩展性和局限性的基本理解。在纳米光子学方面，EBL使新墨西哥大学的研究领域从分子化学到太阳能电池工程。在纳米力学方面，新墨西哥大学的研究人员使用EBL开发新的成像、传感和光刻技术。更广泛的影响：EBL系统将用于为研究生提供EBL研究方面的培训。EBL也被整合到新墨西哥大学的纳米光子学和纳米电子学本科课程中。EBL系统为学生提供学术界、国家实验室以及半导体、光子学和量子技术行业的先进技术劳动力培训。此外，联合pi还主持了qur - reach项目，这是一个面向新墨西哥州本科生的量子技术暑期研究项目，招收了不同的学生。将EBL纳入这项工作将提高参与者的招聘前景和培训经验。CHTM还为高中学生和教师举办为期一年的服务学习体验和暑期讲习班，主要来自阿尔伯克基经济条件较差的学校。这些学生和教师将参与ebl支持的研究，并观察该工具的作用。该项目由主要研究仪器（MRI）计划和促进竞争研究的既定计划（EPSCoR）共同资助。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

This MRI proposal seeks acquisition of an electron-beam lithography (EBL) system to support education and research at the University of New Mexico (UNM) and surrounding regions. UNM is a Carnegie R1, Minority-Serving Institution with a student body that is approximately 50% Hispanic and 12% American Indian, and this proposal leverages this unique environment to train students from historically underrepresented backgrounds in EBL and its applications. The EBL system will be installed at the Center for High Technology Materials (CHTM), a center with a 40-year record of leadership in photonics and semiconductor research that serves a broad range of internal and external researchers.Intellectual Merit:Nanofabricated devices are at the heart of numerous fields of science and engineering, ranging from photonics to biochemistry and quantum technologies. EBL is the workhorse tool in nanofabrication, and regular access to high-quality EBL is a requirement for many nanoscience research projects. At UNM, over fifteen PIs in multiple disciplines (e.g., Electrical, Mechanical, Chemical Engineering, Physics, and Chemistry) use EBL. In quantum technology, UNM researchers use EBL-defined devices to build a fundamental understanding of the potential, scalability, and limits of quantum devices. In nanophotonics, EBL enables UNM research in areas from molecular chemistry to solar cell engineering. In nanomechanics, UNM researchers use EBL in developing new imaging, sensing, and lithography techniques. Broader Impacts:The EBL system will be used to provide training to graduate students in EBL-enabled research. EBL is also being integrated into UNM undergraduate nanophotonics and nano-electronics courses. The EBL system provides students with advanced technical workforce training for academia, national labs, and the semiconductor, photonics, and quantum technology industries. Additionally, the co-PIs host the QU-REACH program, a summer research experience in Quantum Technology for New Mexico undergraduates, with a diverse student intake. Integrating EBL into this effort will enhance the participants' recruitment prospects and training experience. CHTM also hosts year-long service learning experiences and summer workshops for high school students and teachers, mostly from economically disadvantaged schools in Albuquerque. These students and teachers will participate in EBL-enabled research and observe the tool in action.This project is jointly funded by the Major Research Instrumentation (MRI) program and the Established Program to Stimulate Competitive Research (EPSCoR).This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.