NSF MRI Track 2: Acquisition of an Electron Beam Lithography and Imaging System for Research, Education, and Training

该MRI提案旨在收购电子束光刻（EBL）系统，以支持新墨西哥州大学（UNM）及周边地区的教育和研究。UNM是卡内基R1，少数民族服务机构，学生人数约为50%西班牙裔和12%美国印第安人，该提案利用这种独特的环境来培养来自EBL及其应用程序历史上代表性不足背景的学生。EBL系统将安装在高技术材料中心（CHTM），该中心在光子学和半导体研究领域拥有40年的领先记录，为内部和外部的广泛研究人员提供服务。智力优势：纳米制造设备是从光子学到生物化学和量子技术等众多科学和工程领域的核心。EBL是纳米制造业的主力工具，定期获得高质量的EBL是许多纳米科学研究项目的要求。在UNM，超过15个专业人员在多个学科（例如， 电气、机械、化学工程、物理和化学）使用EBL。在量子技术中，UNM的研究人员使用EBL定义的设备来建立对量子设备的潜力，可扩展性和限制的基本理解。在纳米光子学方面，EBL使UNM的研究领域从分子化学到太阳能电池工程。在纳米力学方面，UNM的研究人员使用EBL开发新的成像，传感和光刻技术。更广泛的影响：EBL系统将用于为研究生提供EBL研究方面的培训。EBL也被整合到UNM本科纳米光子学和纳米电子学课程。EBL系统为学生提供学术界，国家实验室以及半导体，光子学和量子技术行业的先进技术劳动力培训。此外，co-PI主办QU-REACH计划，这是新墨西哥州本科生在量子技术方面的夏季研究经验，学生人数多样化。将EBL纳入这一努力将改善参与者的招聘前景和培训经验。CHTM还为高中学生和教师举办为期一年的服务学习体验和暑期讲习班，这些学生和教师大多来自阿尔伯克基经济困难的学校。这些学生和教师将参与基于EBL的研究，并观察该工具的实际应用。该项目由重大研究仪器（MRI）计划和刺激竞争性研究的既定计划（EPSCoR）共同资助。该奖项反映了NSF的法定使命，并通过使用基金会的智力价值和更广泛的影响审查标准进行评估，被认为值得支持。

This MRI proposal seeks acquisition of an electron-beam lithography (EBL) system to support education and research at the University of New Mexico (UNM) and surrounding regions. UNM is a Carnegie R1, Minority-Serving Institution with a student body that is approximately 50% Hispanic and 12% American Indian, and this proposal leverages this unique environment to train students from historically underrepresented backgrounds in EBL and its applications. The EBL system will be installed at the Center for High Technology Materials (CHTM), a center with a 40-year record of leadership in photonics and semiconductor research that serves a broad range of internal and external researchers.Intellectual Merit:Nanofabricated devices are at the heart of numerous fields of science and engineering, ranging from photonics to biochemistry and quantum technologies. EBL is the workhorse tool in nanofabrication, and regular access to high-quality EBL is a requirement for many nanoscience research projects. At UNM, over fifteen PIs in multiple disciplines (e.g., Electrical, Mechanical, Chemical Engineering, Physics, and Chemistry) use EBL. In quantum technology, UNM researchers use EBL-defined devices to build a fundamental understanding of the potential, scalability, and limits of quantum devices. In nanophotonics, EBL enables UNM research in areas from molecular chemistry to solar cell engineering. In nanomechanics, UNM researchers use EBL in developing new imaging, sensing, and lithography techniques. Broader Impacts:The EBL system will be used to provide training to graduate students in EBL-enabled research. EBL is also being integrated into UNM undergraduate nanophotonics and nano-electronics courses. The EBL system provides students with advanced technical workforce training for academia, national labs, and the semiconductor, photonics, and quantum technology industries. Additionally, the co-PIs host the QU-REACH program, a summer research experience in Quantum Technology for New Mexico undergraduates, with a diverse student intake. Integrating EBL into this effort will enhance the participants' recruitment prospects and training experience. CHTM also hosts year-long service learning experiences and summer workshops for high school students and teachers, mostly from economically disadvantaged schools in Albuquerque. These students and teachers will participate in EBL-enabled research and observe the tool in action.This project is jointly funded by the Major Research Instrumentation (MRI) program and the Established Program to Stimulate Competitive Research (EPSCoR).This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.