NSF MRI Track 2: Acquisition of an Electron Beam Lithography and Imaging System for Research, Education, and Training

这项核磁共振提案寻求购买电子束光刻(EBL)系统，以支持新墨西哥大学(UNM)及其周边地区的教育和研究。北卡罗来纳州立大学是一所卡内基R1少数民族服务机构，学生群体中约50%是西班牙裔，12%是美国印第安人，这项建议利用这一独特的环境来培训来自历史上代表性不足的背景的学生学习EBL及其应用。EBL系统将安装在高技术材料中心(CHTM)，该中心在光子学和半导体研究方面拥有40年的领先记录，为国内外广泛的研究人员提供服务。智力优势：纳米加工设备是从光子学到生物化学和量子技术的众多科学和工程领域的核心。EBL是纳米制造中的主力工具，经常获得高质量的EBL是许多纳米科学研究项目的要求。在UNM，多个学科(例如，电气、机械、化学工程、物理和化学)的15个以上的PI使用EBL。在量子技术方面，UNM的研究人员使用EBL定义的设备来建立对量子设备的潜力、可伸缩性和局限性的基本理解。在纳米光子学方面，EBL使UNM能够在从分子化学到太阳能电池工程的领域进行研究。在纳米力学方面，UNM的研究人员使用EBL来开发新的成像、传感和光刻技术。更广泛的影响：EBL系统将用于为研究生提供EBL支持的研究方面的培训。EBL还被纳入了北卡罗来纳大学的纳米光子学和纳米电子学本科课程。EBL系统为学生提供针对学术界、国家实验室以及半导体、光电子和量子技术行业的高级技术劳动力培训。此外，合作PI还举办Qu-REACH项目，这是为新墨西哥州本科生提供的量子技术暑期研究体验，招收的学生种类繁多。将循证学习融入这一努力将增强参与者的招聘前景和培训经验。CHTM还为高中生和教师举办为期一年的服务学习体验和暑期研讨会，他们大多来自阿尔伯克基的经济困难学校。这些学生和教师将参与EBL支持的研究，并观察实际操作中的工具。该项目由主要研究工具(MRI)计划和既定的激励竞争研究计划(EPSCoR)联合资助。该奖项反映了NSF的法定使命，并通过使用基金会的智力优势和更广泛的影响审查标准进行评估，被认为值得支持。

This MRI proposal seeks acquisition of an electron-beam lithography (EBL) system to support education and research at the University of New Mexico (UNM) and surrounding regions. UNM is a Carnegie R1, Minority-Serving Institution with a student body that is approximately 50% Hispanic and 12% American Indian, and this proposal leverages this unique environment to train students from historically underrepresented backgrounds in EBL and its applications. The EBL system will be installed at the Center for High Technology Materials (CHTM), a center with a 40-year record of leadership in photonics and semiconductor research that serves a broad range of internal and external researchers.Intellectual Merit:Nanofabricated devices are at the heart of numerous fields of science and engineering, ranging from photonics to biochemistry and quantum technologies. EBL is the workhorse tool in nanofabrication, and regular access to high-quality EBL is a requirement for many nanoscience research projects. At UNM, over fifteen PIs in multiple disciplines (e.g., Electrical, Mechanical, Chemical Engineering, Physics, and Chemistry) use EBL. In quantum technology, UNM researchers use EBL-defined devices to build a fundamental understanding of the potential, scalability, and limits of quantum devices. In nanophotonics, EBL enables UNM research in areas from molecular chemistry to solar cell engineering. In nanomechanics, UNM researchers use EBL in developing new imaging, sensing, and lithography techniques. Broader Impacts:The EBL system will be used to provide training to graduate students in EBL-enabled research. EBL is also being integrated into UNM undergraduate nanophotonics and nano-electronics courses. The EBL system provides students with advanced technical workforce training for academia, national labs, and the semiconductor, photonics, and quantum technology industries. Additionally, the co-PIs host the QU-REACH program, a summer research experience in Quantum Technology for New Mexico undergraduates, with a diverse student intake. Integrating EBL into this effort will enhance the participants' recruitment prospects and training experience. CHTM also hosts year-long service learning experiences and summer workshops for high school students and teachers, mostly from economically disadvantaged schools in Albuquerque. These students and teachers will participate in EBL-enabled research and observe the tool in action.This project is jointly funded by the Major Research Instrumentation (MRI) program and the Established Program to Stimulate Competitive Research (EPSCoR).This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.