Collaborative Research: Wavelet Analysis of Periodic Error for Improved Displacement Metrology

合作研究:改进位移计量的周期性误差小波分析

基本信息

  • 批准号:
    1265842
  • 负责人:
  • 金额:
    $ 8.4万
  • 依托单位:
  • 依托单位国家:
    美国
  • 项目类别:
    Standard Grant
  • 财政年份:
    2013
  • 资助国家:
    美国
  • 起止时间:
    2013-08-01 至 2016-07-31
  • 项目状态:
    已结题

项目摘要

This grant will enable new fundamental research into displacement measuring interferometry. In the heterodyne, or two-frequency, systems to be studied here, the phase shift in laser light of one frequency reflected from a moving target relative to laser light of a second frequency reflected from a fixed target is used to determine displacement in applications requiring sub-nanometer positioning accuracy. The objective of the research is to apply wavelet analysis techniques to characterize periodic error, which is caused by mixing of the two light frequencies and leads to non-cumulative positioning errors on the order of several nanometers. Wavelets provide a new approach to signal analysis for periodic error; they have previously been used in image compression, voice recognition, and medical applications. The use of wavelets, rather than the more traditional Fourier transform approach, is required because periodic error varies with time under non-constant velocity conditions. Additionally, the error amplitude is time-varying when polarization-maintaining fibers are used to deliver the laser light to the interferometer optics. This is a common occurrence because it is generally desired to isolate the heat-generating laser source from the measurement platform. If successful, this research will enable improved metrology capabilities and, subsequently, new technological advancements in the nano-science field. This research promises to improve the measurement technique (displacement measuring interferometry) that offers the highest performance in terms of accuracy, resolution, and range. This transducer is critical to the semiconductor manufacturing industry, for example, where it is used in a feedback control system to position the silicon wafer relative to the lithographic optics. One limitation on the achievable linewidth (and, ultimately, the chip processing speed) is the stage positioning accuracy. Other applications include transducer calibration and machines for material removal.
这笔赠款将使位移测量干涉测量的新的基础研究成为可能。在这里要研究的外差或双频率系统中,在需要亚纳米定位精度的应用中,使用从移动目标反射的一个频率的激光相对于从固定目标反射的第二频率的激光的相移来确定位移。这项研究的目的是应用小波分析技术来表征由两个光频混合引起的周期性误差,并导致几个纳米量级的非累积定位误差。小波为周期性误差的信号分析提供了一种新的方法;它们以前曾被用于图像压缩、语音识别和医疗应用。由于在变速条件下,周期误差随时间变化,因此需要使用小波而不是更传统的傅立叶变换方法。此外,当偏振保持光纤被用于将激光传输到干涉仪光学元件时,误差幅度是时变的。这是一种常见的情况,因为通常希望将产生热的激光源与测量平台隔离。如果成功,这项研究将提高计量能力,从而推动纳米科学领域的新技术进步。这项研究承诺改进在精度、分辨率和范围方面提供最高性能的测量技术(位移测量干涉法)。例如,这种换能器对半导体制造行业至关重要,在该行业中,它被用在反馈控制系统中,以相对于光刻光学元件定位硅片。可实现的线宽(以及最终的芯片处理速度)的一个限制是平台定位精度。其他应用包括传感器校准和材料去除机器。

项目成果

期刊论文数量(0)
专著数量(0)
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会议论文数量(0)
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Tony Schmitz其他文献

AFSD-Physics: Exploring the governing equations of temperature evolution during additive friction stir deposition by a human-AI teaming approach
AFSD-物理:通过人机交互方法探索附加搅拌摩擦沉积过程中温度演化的控制方程
  • DOI:
    10.48550/arxiv.2401.16501
  • 发表时间:
    2024
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Tony Shi;Mason Ma;Jiajie Wu;Chase Post;Elijah Charles;Tony Schmitz
  • 通讯作者:
    Tony Schmitz
Surface prediction and measurement for modulated tool path (MTP) turning
  • DOI:
    10.1016/j.mfglet.2021.07.001
  • 发表时间:
    2021-08-01
  • 期刊:
  • 影响因子:
  • 作者:
    Ryan Copenhaver;Scott Smith;Tony Schmitz
  • 通讯作者:
    Tony Schmitz
Emerging Opportunities in Distributed Manufacturing: Results and Analysis of an Expert Study
分布式制造中的新兴机遇:专家研究的结果和分析
  • DOI:
  • 发表时间:
    2024
  • 期刊:
  • 影响因子:
    3.3
  • 作者:
    Glenn Daehn;Craig Blue;Charles Johnson;John J. Lewandowski;Tom Mahoney;C. Okwudire;Tali Rossman;Tony Schmitz;Rebecca Silveston
  • 通讯作者:
    Rebecca Silveston
Physics-informed KNN milling stability model with process damping effects
Cutting force estimation from machine learning and physics-inspired data-driven models utilizing accelerometer measurements
  • DOI:
    10.1016/j.procir.2024.08.361
  • 发表时间:
    2024-01-01
  • 期刊:
  • 影响因子:
  • 作者:
    Gregory W. Vogl;Yongzhi Qu;Reese Eischens;Gregory Corson;Tony Schmitz;Andrew Honeycutt;Jaydeep Karandikar;Scott Smith
  • 通讯作者:
    Scott Smith

Tony Schmitz的其他文献

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{{ truncateString('Tony Schmitz', 18)}}的其他基金

Workshop/Collaborative Research: NSF Proposal Writing Workshop at 47th SME NAMRC and ASME MSEC; Erie, Pennsylvania; June 10, 2019
研讨会/合作研究:第 47 届 SME NAMRC 和 ASME MSEC 的 NSF 提案写作研讨会;
  • 批准号:
    1907700
  • 财政年份:
    2019
  • 资助金额:
    $ 8.4万
  • 项目类别:
    Standard Grant
GOALI: Reducing Manufacturing Cost for the Energy Industry through Predictive Process Modeling
目标:通过预测过程建模降低能源行业的制造成本
  • 批准号:
    1937883
  • 财政年份:
    2019
  • 资助金额:
    $ 8.4万
  • 项目类别:
    Standard Grant
Workshop/Collaborative Research: NSF Proposal Writing Workshop at 46th SME NAMRC and ASME MSEC 2018; Texas A&M University; College Station, Texas; June 18, 2018
研讨会/合作研究:2018 年第 46 届 SME NAMRC 和 ASME MSEC 的 NSF 提案写作研讨会;
  • 批准号:
    1949822
  • 财政年份:
    2019
  • 资助金额:
    $ 8.4万
  • 项目类别:
    Standard Grant
Workshop/Collaborative Research: NSF Proposal Writing Workshop at 47th SME NAMRC and ASME MSEC; Erie, Pennsylvania; June 10, 2019
研讨会/合作研究:第 47 届 SME NAMRC 和 ASME MSEC 的 NSF 提案写作研讨会;
  • 批准号:
    1938268
  • 财政年份:
    2019
  • 资助金额:
    $ 8.4万
  • 项目类别:
    Standard Grant
Workshop: Research Needs in Machining and Machine Tools; National Science Foundation; Alexandria, Virginia; March 5-6, 2018
研讨会:机械加工和机床的研究需求;
  • 批准号:
    1943692
  • 财政年份:
    2019
  • 资助金额:
    $ 8.4万
  • 项目类别:
    Standard Grant
Workshop/Collaborative Research: NSF Proposal Writing Workshop at 46th SME NAMRC and ASME MSEC 2018; Texas A&M University; College Station, Texas; June 18, 2018
研讨会/合作研究:2018 年第 46 届 SME NAMRC 和 ASME MSEC 的 NSF 提案写作研讨会;
  • 批准号:
    1822446
  • 财政年份:
    2018
  • 资助金额:
    $ 8.4万
  • 项目类别:
    Standard Grant
Workshop: Research Needs in Machining and Machine Tools; National Science Foundation; Alexandria, Virginia; March 5-6, 2018
研讨会:机械加工和机床的研究需求;
  • 批准号:
    1822177
  • 财政年份:
    2018
  • 资助金额:
    $ 8.4万
  • 项目类别:
    Standard Grant
Workshop: 2017 NSF Proposal Writing Workshop; Los Angeles, California; June 4, 2017
研讨会:2017 NSF提案写作研讨会;
  • 批准号:
    1735746
  • 财政年份:
    2017
  • 资助金额:
    $ 8.4万
  • 项目类别:
    Standard Grant
GOALI: Reducing Manufacturing Cost for the Energy Industry through Predictive Process Modeling
目标:通过预测过程建模降低能源行业的制造成本
  • 批准号:
    1561221
  • 财政年份:
    2016
  • 资助金额:
    $ 8.4万
  • 项目类别:
    Standard Grant
Workshop: 2016 NSF Proposal Writing Workshop; Blacksburg, Virginia; June 27, 2016
研讨会:2016 NSF提案写作研讨会;
  • 批准号:
    1642628
  • 财政年份:
    2016
  • 资助金额:
    $ 8.4万
  • 项目类别:
    Standard Grant

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合作研究:成像变分模型的小波框架:桥接离散和连续体
  • 批准号:
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