A New Robust and Energy-efficient Microactuator Device for Demanding Applications

适用于高要求应用的新型稳健且节能的微执行器设备

• 批准号: 1307237
• 负责人: Feng Zhao
• 金额: $ 24.01万
• 依托单位: Washington State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-06-01 至 2017-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1307237&HistoricalAwards=false
• 关键词: New; Robust; Energy; efficient; Microactuator

The objective of this program is to explore and lay a solid foundation for a new generation of microactuator devices. The robust microactuator device developed in the program will satisfy the imperative demands of energy efficiency and operation in harsh environments, including high temperature and pressure, radiation, corrosion, chemical and biological domains, etc. The intellectual merit is to develop a novel microactuator device technology which combines the advantages of photonic actuation and wide bandgap silicon carbide material. The all silicon carbide platform truly exploits the superior material properties of silicon carbide for demanding applications. The photonic actuation enables intrinsic safety, reliability, and electromagnetic interference immunity. The key technological challenge currently limiting silicon carbide microelectromechanical systems fabrication will be solved by an innovative surface micromachining process. High speed and high energy efficiency will be accomplished by a series of unique approaches. The proposed work is expected to achieve a new device technology offering harsh environment operability and long-term reliability, open a new strategic area of research on silicon carbide, and advance the state-of-the-art of a wide range of sensing and actuating systems.The broader impacts are to expose graduate and undergraduate students involved in the project to an interdisciplinary approach for problem solving, including solid state electronics, mechanical engineering, photonic and quantum mechanical simulations, and device fabrication and characterization. It will broaden dissemination to enhance scientific and technological understanding through journal and conference publications, K-12 outreach, and industrial interaction and partnership.

本项目的目标是为新一代微致动器器件的开发和研制奠定坚实的基础。在该计划中开发的强大的微致动器设备将满足能源效率和恶劣环境下的操作的迫切需求，包括高温高压，辐射，腐蚀，化学和生物领域等的智力价值是开发一种新型的微致动器器件技术，结合了光子致动和宽带隙碳化硅材料的优点。全碳化硅平台真正利用碳化硅的上级材料特性，满足苛刻的应用需求。光子致动实现了本质安全性、可靠性和电磁干扰抗扰性。目前限制碳化硅微机电系统制造的关键技术挑战将通过创新的表面微加工工艺来解决。高速和高能效将通过一系列独特的方法来实现。这项工作将实现一种新的器件技术，提供恶劣环境下的可操作性和长期可靠性，开辟碳化硅研究的新战略领域，并推进各种传感和致动系统的最新技术水平。更广泛的影响是让参与该项目的研究生和本科生接触到解决问题的跨学科方法，包括固态电子学，机械工程、光子和量子力学模拟以及器件制造和表征。 它将通过期刊和会议出版物、K-12外联以及工业互动和伙伴关系扩大传播，以提高科学和技术理解。