CAREER: Nano Electro Mechanical Resonant Sensing Platform for Chip Scale, High Resolution and Ultra-Fast Terahertz Spectroscopy and Imaging

职业：用于芯片级、高分辨率和超快太赫兹光谱和成像的纳米机电谐振传感平台

• 批准号: 1350114
• 负责人: Matteo Rinaldi
• 金额: $ 40万
• 依托单位: Northeastern University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2014
• 资助国家: 美国
• 起止时间: 2014-04-15 至 2020-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1350114&HistoricalAwards=false
• 关键词: CAREER; Nano; Electro; Mechanical; Resonant

CAREER: Nano Electro Mechanical Resonant Sensing Platform for Chip Scale, High Resolution and Ultra-Fast Terahertz Spectroscopy and Imaging Matteo Rinaldi, Northeastern UniversityIntellectual Merit: Terahertz (THz) radiation, which lies in the frequency gap between infrared and microwaves, has remarkable potential for diagnostic and imaging applications, among many others. However, inherent technological limitations drastically limit THz generation and detection, a fundamental challenge known as the "THz gap". The objective of this CAREER proposal is to develop a groundbreaking long-range, integrated research and educational program focused on the investigation of new approaches to chip-scale, high-resolution, ultra-fast THz spectroscopy using a new generation of Nano-Electro-Mechanical System (NEMS) devices. The proposed research and educational program will enable the realization of a new class of high performance NEMS resonant THz detectors based on the integration and co-design of advanced piezoelectric nanostructures and photonic metamaterials. This project will address the following: (1) Investigation of innovative efficient piezoelectric transduction of high-frequency bulk acoustic modes of vibration in suspended nano-plates with strong and spectrally selective absorption characteristics to THz radiation. (2) Exploration of the thermal detection capabilities of such piezoelectric resonant nano-plates. (3) Investigation of innovative and advanced NEMS structures based on the integration of metamaterial THz absorbers with Aluminum Nitride (AlN) Nano-Plate Resonators to enable the implementation of a set of spectrally selective THz NEMS resonant detectors that can potentially cover the entire THz spectrum of interest. (4) System-level implementations of chip-scale sensing platforms for THz spectroscopy and imaging through fundamental innovation in wafer level packaging, circuit design and differential measurement techniques.Broader Impact: This long-range integrated research and educational program will lead to a transformative NEMS THz detector technology that will enable the use of THz technologies in a wide variety of applications that could significantly impact the quality of life in different aspects, such as health, security and sustainability. Simultaneously, the proposed program will educate a cadre of experts needed for a full exploitation of these new THz technologies. The following goals will be targeted through outreach, education and technology transfer: (1) Bringing awareness to K-12 and undergraduate students, in collaboration with The Center for STEM Education at Northeastern University, with the integration of "NanoTech Units" into existing summer programs in which students will interact closely with the Principle Investigator (PI) and his graduate research assistants. (2) Hands-on demonstrations at large public venues. (3) Results dissemination through strategic use of online resources. (4) Education and training of graduate and undergraduate students in collaboration with industrial partners on the "Northeastern University Cooperative Education" basis in order to help the students developing the knowledge, awareness, perspective, and confidence necessary to bridge academic research and market needs. (5) Graduate and undergraduate courses development, including topics relevant to the proposed research.

职业：用于芯片级、高分辨率和超快太赫兹光谱学和成像的纳米机电谐振传感平台Matteo Rinaldi，东北大学知识产权：太赫兹（THz）辐射，位于红外和微波之间的频率间隙，在诊断和成像应用等方面具有显着的潜力。然而，固有的技术限制极大地限制了THz的产生和检测，这是一个被称为“THz间隙”的根本挑战。该CAREER提案的目标是开发一个突破性的远程综合研究和教育计划，重点是使用新一代纳米机电系统（NEMS）设备研究芯片级，高分辨率，超快THz光谱学的新方法。拟议的研究和教育计划将实现一类新的高性能NEMS谐振THz探测器，其基础是先进的压电纳米结构和光子超材料的集成和协同设计。本项目将致力于以下几个方面：（1）研究创新的高效压电转换的高频体声波振动模式在悬浮纳米板具有强大的和光谱选择性吸收特性的太赫兹辐射。(2)探索这种压电谐振纳米板的热检测能力。(3)研究基于超材料THz吸收器与氮化铝（AlN）纳米板谐振器集成的创新和先进的NEMS结构，以实现一组光谱选择性THz NEMS谐振探测器，该探测器可能覆盖整个感兴趣的THz光谱。(4)通过晶圆级封装、电路设计和差分测量技术的根本性创新，实现太赫兹光谱和成像的芯片级传感平台的系统级实现。这么久-范围综合研究和教育计划将导致一种变革性的NEMS THz探测器技术，该技术将使THz技术能够在各种各样的应用中使用，这些应用可能会对生活质量产生重大影响在不同的方面，如健康，安全和可持续性。同时，拟议的计划将培养一批充分利用这些新的THz技术所需的专家。以下目标将通过推广，教育和技术转让有针对性：（1）与东北大学STEM教育中心合作，将“纳米技术单元”整合到现有的暑期课程中，学生将与主要研究者（PI）及其研究生研究助理密切互动，提高K-12和本科生的认识。(2)在大型公共场所进行亲身示范。(3)通过战略性利用在线资源传播成果。(4)在“东北大学合作教育”的基础上与工业合作伙伴合作对研究生和本科生进行教育和培训，以帮助学生发展必要的知识，意识，观点和信心，以弥合学术研究和市场需求。(5)研究生和本科生课程开发，包括与拟议研究相关的主题。