CAREER: Nano Electro Mechanical Resonant Sensing Platform for Chip Scale, High Resolution and Ultra-Fast Terahertz Spectroscopy and Imaging

Matteo Rinaldi，东北大学知识优势：太赫兹（THz）辐射位于红外和微波之间的频率间隙，在诊断和成像应用等方面具有显着的潜力。然而，固有的技术限制极大地限制了太赫兹的产生和探测，这是一个被称为“太赫兹间隙”的基本挑战。该CAREER提案的目标是开发一个开创性的远程，综合研究和教育计划，重点研究使用新一代纳米机电系统（NEMS）设备的芯片级，高分辨率，超快速太赫兹光谱的新方法。提出的研究和教育计划将实现基于先进压电纳米结构和光子超材料的集成和共同设计的新型高性能NEMS谐振太赫兹探测器。本项目将解决以下问题：(1)研究悬浮纳米板中高频体声振动模式的创新高效压电转导，该模式对太赫兹辐射具有强的光谱选择性吸收特性。(2)探索这种压电谐振纳米片的热探测能力。(3)研究基于超材料太赫兹吸收器与氮化铝（AlN）纳米板谐振器集成的创新和先进NEMS结构，以实现一套频谱选择性太赫兹NEMS谐振探测器，可能覆盖整个太赫兹频谱。(4)通过晶圆级封装、电路设计和差分测量技术的根本性创新，实现芯片级太赫兹光谱和成像传感平台的系统级实现。更广泛的影响：这一长期的综合研究和教育计划将导致变革性的NEMS太赫兹探测器技术，这将使太赫兹技术在各种各样的应用中得以使用，这些应用可以在不同方面显著影响生活质量，如健康、安全和可持续性。同时，拟议的计划将培养充分利用这些新的太赫兹技术所需的专家骨干。通过推广、教育和技术转移，将实现以下目标：(1)与东北大学STEM教育中心合作，将“纳米技术单元”整合到现有的暑期项目中，学生将与首席研究员（PI）及其研究生研究助理密切互动，提高K-12和本科生的认识。(2)在大型公共场所进行亲身示范。(3)战略利用网络资源进行成果传播。(4)在“东北大学合作办学”的基础上，与产业伙伴合作，对研究生和本科生进行教育和培训，帮助学生培养衔接学术研究和市场需求所需的知识、意识、观点和信心。(5)研究生和本科课程发展，包括与拟研究相关的主题。

CAREER: Nano Electro Mechanical Resonant Sensing Platform for Chip Scale, High Resolution and Ultra-Fast Terahertz Spectroscopy and Imaging Matteo Rinaldi, Northeastern UniversityIntellectual Merit: Terahertz (THz) radiation, which lies in the frequency gap between infrared and microwaves, has remarkable potential for diagnostic and imaging applications, among many others. However, inherent technological limitations drastically limit THz generation and detection, a fundamental challenge known as the "THz gap". The objective of this CAREER proposal is to develop a groundbreaking long-range, integrated research and educational program focused on the investigation of new approaches to chip-scale, high-resolution, ultra-fast THz spectroscopy using a new generation of Nano-Electro-Mechanical System (NEMS) devices. The proposed research and educational program will enable the realization of a new class of high performance NEMS resonant THz detectors based on the integration and co-design of advanced piezoelectric nanostructures and photonic metamaterials. This project will address the following: (1) Investigation of innovative efficient piezoelectric transduction of high-frequency bulk acoustic modes of vibration in suspended nano-plates with strong and spectrally selective absorption characteristics to THz radiation. (2) Exploration of the thermal detection capabilities of such piezoelectric resonant nano-plates. (3) Investigation of innovative and advanced NEMS structures based on the integration of metamaterial THz absorbers with Aluminum Nitride (AlN) Nano-Plate Resonators to enable the implementation of a set of spectrally selective THz NEMS resonant detectors that can potentially cover the entire THz spectrum of interest. (4) System-level implementations of chip-scale sensing platforms for THz spectroscopy and imaging through fundamental innovation in wafer level packaging, circuit design and differential measurement techniques.Broader Impact: This long-range integrated research and educational program will lead to a transformative NEMS THz detector technology that will enable the use of THz technologies in a wide variety of applications that could significantly impact the quality of life in different aspects, such as health, security and sustainability. Simultaneously, the proposed program will educate a cadre of experts needed for a full exploitation of these new THz technologies. The following goals will be targeted through outreach, education and technology transfer: (1) Bringing awareness to K-12 and undergraduate students, in collaboration with The Center for STEM Education at Northeastern University, with the integration of "NanoTech Units" into existing summer programs in which students will interact closely with the Principle Investigator (PI) and his graduate research assistants. (2) Hands-on demonstrations at large public venues. (3) Results dissemination through strategic use of online resources. (4) Education and training of graduate and undergraduate students in collaboration with industrial partners on the "Northeastern University Cooperative Education" basis in order to help the students developing the knowledge, awareness, perspective, and confidence necessary to bridge academic research and market needs. (5) Graduate and undergraduate courses development, including topics relevant to the proposed research.