SBIR Phase I: Development of a Dual Energy Micro-focused X-ray Excitation Beam for Chemical Analysis and Materials Characterization

SBIR 第一阶段：开发用于化学分析和材料表征的双能微聚焦 X 射线激发束

• 批准号: 1448727
• 负责人: Wenbing Yun
• 金额: $ 14.99万
• 依托单位: Sigray
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2015
• 资助国家: 美国
• 起止时间: 2015-01-01 至 2015-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1448727&HistoricalAwards=false
• 关键词: SBIR; Phase; Development; Dual; Energy

This Small Business Innovation Research Phase I project will focus on the development of a system for generating microfocus x-ray excitation beams for X-ray fluorescence (micro-XRF) analysis applications. The resulting instrument will create dual-energy x-rays with high flux in a narrow energy band. Micro-XRF is a powerful, non-destructive, and widely used technique for the determination of elemental composition and elemental mapping, which relies on the measurement of characteristic fluorescent x-rays generated when atoms are excited by x-rays, electrons or other ionizing particles. This method is used in a broad range of applications including mining, semiconductor, forensics, materials research, and even biological research. The project will enable development of Micro-XRF systems with substantially improved elemental detection sensitivity over a large range of atomic numbers (Z) and with higher spatial resolution. The proposed product is expected to significantly impact more than half of the current $900 million x-ray fluorescence market.The intellectual merit of this project is the development of a coaxial dual mirror system which will focus two x-ray beams of different energies onto the sample at high spatial resolution and high flux, enabling a substantial improvement in spatial resolution and enhancing the compositional spot analysis and mapping capabilities of micro X-ray fluorescence analysis (micro-XRF) applications. The proposed project will result in three major advantages for users of micro-XRF: 1) high analytical sensitivity to both low- and high-atomic number elements by the utilization of two x-ray energy ranges, 2) high x-ray flux due to improved optical design, and 3) a longer working distance which will add flexibility and ease integration of the new device into existing equipment.

这项小型企业创新研究第一阶段项目将重点开发用于x射线荧光（micro-XRF）分析应用的微聚焦x射线激发光束系统。由此产生的仪器将在窄能带中产生高通量的双能x射线。Micro-XRF是一种强大的、非破坏性的、广泛应用于元素组成测定和元素测绘的技术，它依赖于对原子被x射线、电子或其他电离粒子激发时产生的特征荧光x射线的测量。这种方法被广泛应用于采矿，半导体，法医，材料研究，甚至生物研究。该项目将开发Micro-XRF系统，在大原子序数(Z)范围内大幅提高元素探测灵敏度，并具有更高的空间分辨率。拟议的产品预计将显著影响目前9亿美元x射线荧光市场的一半以上。该项目的智力优势在于开发了一种同轴双镜系统，该系统将两束不同能量的x射线以高空间分辨率和高通量聚焦到样品上，从而大大提高了空间分辨率，增强了微x射线荧光分析（micro- xrf）应用的成分光斑分析和绘图能力。拟议的项目将为微型xrf用户带来三大优势：1)利用两个x射线能量范围对低原子序数和高原子序数元素的高分析灵敏度，2)改进的光学设计带来的高x射线通量，以及3)更长的工作距离，这将增加灵活性并易于将新设备集成到现有设备中。