MRI: Acquisition of optical interferometric surface profilometer to enhance capabilities in micro- and nano-scale engineering

摘要：本提案要求获得一项主要研究仪器的资金，该仪器可以测量和表征小至纳米尺寸的表面、结构、设备和应用。这样的小尺度特征在包括电子、生物医学和能源等在内的广泛应用中具有相当大的意义。通过本提案获得的仪器将有助于更好地了解小型特征/结构的物理尺寸和轮廓如何影响其功能和其他属性。在开发小型结构和设备时，通常要求在不实际接触或改变结构的情况下进行测量。目前在塔斯基吉大学及其周边地区没有能够进行此类测量的仪器。通过该方案获得的仪器是一个光学干涉表面轮廓仪。它将为塔斯基吉大学的研究人员以及位于塔斯卡卢萨的阿拉巴马大学、南阿拉巴马大学、阿拉巴马州立大学和阿拉巴马农工大学的合作伙伴提供非接触式和非破坏性测量能力。该仪器将构成阿拉巴马州计量基础设施的一个明确的改进。与获得的仪器相关的拟议科学研究将最终有助于设计和制造方法，这将有助于该国在全球市场上更具竞争力。获得的仪器将对塔斯基吉大学的教育和学生研究活动产生积极影响，这是一所历史悠久的黑人学院和大学。更广泛的影响将是在先进技术部门新兴领域培训代表性不足的少数民族本科生和研究生。鉴于这些不同的广泛影响，NSF资助这项研究仪器是合理的。所获得的仪器的主要目标是对各种材料表面的表面纹理、表面粗糙度、薄膜厚度、薄膜应力分析、磨损体积测量、拓扑角度的颗粒和孔隙分析、晶粒结构分析以及缺陷检测和表征进行非接触和非破坏性研究。获得的光学干涉表面轮廓仪将允许这些研究，垂直分辨率为Ü 0.1纳米，横向分辨率为500纳米。这些研究将用于阐明涉及传感器、薄膜、硅光子学、微机电系统、纳米制造和聚合物纳米复合材料、生物工程表面和结构、能源设备以及医疗设备和植入物的失效表征等微纳米工程的基本和高级机制。一个关键的辅助目标是培训属于代表性不足的社区的学生在多学科研究中使用的先进计量技术。另一个目标是在半导体、微电子和纳米技术领域的本科/研究生课程中实施动手学习模块。所提议的活动的智力意义在于将对微和纳米工程结构和表面的2D/3D拓扑，形态和其他方面进行各种基础研究，并了解这些如何影响这些小维度实体所表现出的特性

Abstract:This proposal requests funds for the acquisition of a major research instrument that can measure and characterize surfaces, structures, devices and applications having dimensions as small as nanometers. Such small scale features have considerable significance in a wide variety of applications including electronics, biomedicine, and energy, among others. The instrument to be acquired through this proposal will allow for a better understanding of how physical dimensions and profiles of small scale features/structures influence their functionality and other attributes.When developing small scale structures and devices, it is often required that measurements be made without physically touching or altering the structures. There is currently no instrumentation capable of making such measurements at Tuskegee University and its surrounding areas. The instrumentation to be acquired through this proposal is an optical interferometric surface profilometer. It will provide capabilities on non-contact and non-destructive measurements to researchers at Tuskegee University, and partners at University of Alabama at Tuscaloosa, University of South Alabama, Alabama State University, and Alabama A & M University. The instrument will constitute a definite improvement in metrology infrastructure in Alabama. The proposed scientific studies related to the acquired instrument will eventually contribute to design and manufacturing methodologies that will help the nation become more competitive in the global market. The acquired instrumentation will positively impact educational and student research activities at Tuskegee University, a historically black college and university. A broader impact will be on the training of underrepresented minority undergraduate and graduate students in emerging areas in the advanced technology sector. In view of these various broad impacts, NSF funding for this research instrumentation is justified.The primary goal of the acquired instrumentation is non-contact and non-destructive studies on surface texture, surface roughness, film thickness, stress analysis of thin films, wear volume measurement, particle and pore analysis from a topological perspective, grain structure analysis and defect inspection and characterization on a diverse range of material surfaces. The acquired optical interferometric surface profilometer will allow for these studies with a vertical resolution of ¡Ü 0.1 nanometers, and lateral resolution of 500 nanometers. These studies will be used to elucidate on basic and advanced mechanisms involved in the micro- and nano-engineering of sensors, thin films, silicon photonics, micro-electromechanical systems, nano-fabrication, and polymer nanocomposites, bioengineered surfaces and structures, energy devices, and failure characterization of medical devices and implants. A key ancillary goal is the training of students belonging to underrepresented community in advanced metrology techniques used in multidisciplinary research. Another goal is to implement hands-on learning modules in undergraduate/graduate level courses in the areas of semiconductor, microelectronics, and nanotechnology.The intellectual significance of the proposed activity is in the various fundamental studies that would be conducted on the 2D/3D topology, morphology and other aspects of micro- and nano-engineered structures and surfaces, and understanding how these impact the properties exhibited by such small dimension entities