MRI: Acquisition of optical interferometric surface profilometer to enhance capabilities in micro- and nano-scale engineering

摘要：这项提案要求获得资金，用于购买一种主要的研究仪器，该仪器可以测量和表征尺寸小至纳米的表面、结构、设备和应用。这种小尺寸特征在包括电子、生物医学和能源等在内的广泛应用中具有相当重要的意义。通过这项提议获得的仪器将使人们能够更好地了解小规模特征/结构的物理尺寸和轮廓如何影响其功能和其他属性。当开发小规模结构和设备时，通常要求在不接触或改变结构的情况下进行测量。塔斯基吉大学及其周边地区目前还没有能够进行这种测量的仪器。通过这一提议获得的仪器是光学干涉表面轮廓仪。它将为塔斯基吉大学的研究人员以及阿拉巴马大学塔斯卡卢萨分校、南阿拉巴马大学、阿拉巴马州立大学和阿拉巴马农工大学的合作伙伴提供非接触和非破坏性测量能力。该仪器将构成阿拉巴马州计量基础设施的明确改进。与收购仪器相关的拟议科学研究最终将有助于设计和制造方法，从而帮助国家在全球市场上变得更具竞争力。获得的仪器将对塔斯基吉大学的教育和学生研究活动产生积极影响，塔斯基吉大学是一所历史上的黑人学院和大学。一个更广泛的影响将是在先进技术部门的新兴领域培训人数不足的少数族裔本科生和研究生。考虑到这些不同的广泛影响，NSF资助这一研究仪器是合理的。收购仪器的主要目标是非接触和无损地研究表面纹理、表面粗糙度、薄膜厚度、薄膜的应力分析、磨损体积测量、从拓扑角度的颗粒和气孔分析、颗粒结构分析以及对各种材料表面的缺陷检测和表征。获得的光学干涉表面轮廓仪将允许这些研究，垂直分辨率为？0.1纳米，横向分辨率为500纳米。这些研究将用于阐明传感器、薄膜、硅光子学、微电子机械系统、纳米制造、聚合物纳米复合材料、生物工程表面和结构、能源设备以及医疗器械和植入物的失效表征等微和纳米工程中涉及的基本和高级机制。一个关键的辅助目标是培训属于代表性不足群体的学生在多学科研究中使用先进的计量学技术。另一个目标是在半导体、微电子学和纳米技术领域的本科生/研究生水平课程中实施动手学习模块。拟议活动的智力意义在于将对微和纳米工程结构和表面的2D/3D拓扑、形态和其他方面进行的各种基础研究，并了解这些如何影响这些小尺寸实体所展示的特性

Abstract:This proposal requests funds for the acquisition of a major research instrument that can measure and characterize surfaces, structures, devices and applications having dimensions as small as nanometers. Such small scale features have considerable significance in a wide variety of applications including electronics, biomedicine, and energy, among others. The instrument to be acquired through this proposal will allow for a better understanding of how physical dimensions and profiles of small scale features/structures influence their functionality and other attributes.When developing small scale structures and devices, it is often required that measurements be made without physically touching or altering the structures. There is currently no instrumentation capable of making such measurements at Tuskegee University and its surrounding areas. The instrumentation to be acquired through this proposal is an optical interferometric surface profilometer. It will provide capabilities on non-contact and non-destructive measurements to researchers at Tuskegee University, and partners at University of Alabama at Tuscaloosa, University of South Alabama, Alabama State University, and Alabama A & M University. The instrument will constitute a definite improvement in metrology infrastructure in Alabama. The proposed scientific studies related to the acquired instrument will eventually contribute to design and manufacturing methodologies that will help the nation become more competitive in the global market. The acquired instrumentation will positively impact educational and student research activities at Tuskegee University, a historically black college and university. A broader impact will be on the training of underrepresented minority undergraduate and graduate students in emerging areas in the advanced technology sector. In view of these various broad impacts, NSF funding for this research instrumentation is justified.The primary goal of the acquired instrumentation is non-contact and non-destructive studies on surface texture, surface roughness, film thickness, stress analysis of thin films, wear volume measurement, particle and pore analysis from a topological perspective, grain structure analysis and defect inspection and characterization on a diverse range of material surfaces. The acquired optical interferometric surface profilometer will allow for these studies with a vertical resolution of ¡Ü 0.1 nanometers, and lateral resolution of 500 nanometers. These studies will be used to elucidate on basic and advanced mechanisms involved in the micro- and nano-engineering of sensors, thin films, silicon photonics, micro-electromechanical systems, nano-fabrication, and polymer nanocomposites, bioengineered surfaces and structures, energy devices, and failure characterization of medical devices and implants. A key ancillary goal is the training of students belonging to underrepresented community in advanced metrology techniques used in multidisciplinary research. Another goal is to implement hands-on learning modules in undergraduate/graduate level courses in the areas of semiconductor, microelectronics, and nanotechnology.The intellectual significance of the proposed activity is in the various fundamental studies that would be conducted on the 2D/3D topology, morphology and other aspects of micro- and nano-engineered structures and surfaces, and understanding how these impact the properties exhibited by such small dimension entities