MRI: Acquisition of optical interferometric surface profilometer to enhance capabilities in micro- and nano-scale engineering

MRI：购买光学干涉表面轮廓仪以增强微米级和纳米级工程能力

• 批准号: 1625857
• 负责人: Naga Srinivas Korivi
• 金额: $ 13.8万
• 依托单位: Tuskegee University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-09-01 至 2018-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1625857&HistoricalAwards=false
• 关键词: MRI; Acquisition; optical; interferometric; surface

Abstract:This proposal requests funds for the acquisition of a major research instrument that can measure and characterize surfaces, structures, devices and applications having dimensions as small as nanometers. Such small scale features have considerable significance in a wide variety of applications including electronics, biomedicine, and energy, among others. The instrument to be acquired through this proposal will allow for a better understanding of how physical dimensions and profiles of small scale features/structures influence their functionality and other attributes.When developing small scale structures and devices, it is often required that measurements be made without physically touching or altering the structures. There is currently no instrumentation capable of making such measurements at Tuskegee University and its surrounding areas. The instrumentation to be acquired through this proposal is an optical interferometric surface profilometer. It will provide capabilities on non-contact and non-destructive measurements to researchers at Tuskegee University, and partners at University of Alabama at Tuscaloosa, University of South Alabama, Alabama State University, and Alabama A & M University. The instrument will constitute a definite improvement in metrology infrastructure in Alabama. The proposed scientific studies related to the acquired instrument will eventually contribute to design and manufacturing methodologies that will help the nation become more competitive in the global market. The acquired instrumentation will positively impact educational and student research activities at Tuskegee University, a historically black college and university. A broader impact will be on the training of underrepresented minority undergraduate and graduate students in emerging areas in the advanced technology sector. In view of these various broad impacts, NSF funding for this research instrumentation is justified.The primary goal of the acquired instrumentation is non-contact and non-destructive studies on surface texture, surface roughness, film thickness, stress analysis of thin films, wear volume measurement, particle and pore analysis from a topological perspective, grain structure analysis and defect inspection and characterization on a diverse range of material surfaces. The acquired optical interferometric surface profilometer will allow for these studies with a vertical resolution of ¡Ü 0.1 nanometers, and lateral resolution of 500 nanometers. These studies will be used to elucidate on basic and advanced mechanisms involved in the micro- and nano-engineering of sensors, thin films, silicon photonics, micro-electromechanical systems, nano-fabrication, and polymer nanocomposites, bioengineered surfaces and structures, energy devices, and failure characterization of medical devices and implants. A key ancillary goal is the training of students belonging to underrepresented community in advanced metrology techniques used in multidisciplinary research. Another goal is to implement hands-on learning modules in undergraduate/graduate level courses in the areas of semiconductor, microelectronics, and nanotechnology.The intellectual significance of the proposed activity is in the various fundamental studies that would be conducted on the 2D/3D topology, morphology and other aspects of micro- and nano-engineered structures and surfaces, and understanding how these impact the properties exhibited by such small dimension entities

翻译后摘要：该提案要求资金收购的一个主要的研究仪器，可以测量和表征表面，结构，设备和应用程序具有小到纳米的尺寸。这种小尺度特征在包括电子、生物医学和能源等的各种应用中具有相当大的意义。通过本提案获得的仪器将有助于更好地了解小尺度特征/结构的物理尺寸和轮廓如何影响其功能和其他属性。在开发小尺度结构和设备时，通常需要在不接触或改变结构的情况下进行测量。目前在塔斯基吉大学及其周边地区还没有能够进行这种测量的仪器。通过本提案获得的仪器是光学干涉表面轮廓仪。它将为塔斯基吉大学的研究人员以及位于塔斯卡卢萨的亚拉巴马大学、南亚拉巴马大学、亚拉巴马州立大学和亚拉巴马A M大学的合作伙伴提供非接触和非破坏性测量的能力。该仪器将构成亚拉巴马计量基础设施的明确改进。与所收购仪器相关的拟议科学研究最终将有助于设计和制造方法，这将有助于该国在全球市场上更具竞争力。收购的仪器将积极影响教育和学生的研究活动在塔斯基吉大学，一个历史悠久的黑人学院和大学。更广泛的影响将是在先进技术部门的新兴领域培训代表性不足的少数民族本科生和研究生。鉴于这些广泛的影响，NSF对该研究仪器的资助是合理的。所获得仪器的主要目标是对表面纹理、表面粗糙度、膜厚度、薄膜应力分析、磨损量测量、从拓扑角度的颗粒和孔隙分析进行非接触和非破坏性研究，对各种材料表面进行晶粒结构分析、缺陷检测和表征。所获得的光学干涉表面轮廓仪将允许这些研究的垂直分辨率为0.1纳米，横向分辨率为500纳米。这些研究将用于阐明传感器，薄膜，硅光子学，微机电系统，纳米制造和聚合物纳米复合材料，生物工程表面和结构，能源设备以及医疗设备和植入物的故障表征的微观和纳米工程中涉及的基本和先进机制。一个关键的辅助目标是培训属于代表性不足社区的学生掌握多学科研究中使用的先进计量技术。另一个目标是在半导体、微电子和纳米技术领域的本科/研究生课程中实施实践学习模块。拟议活动的智力意义在于对2D/3D拓扑结构、形态学和微纳米工程结构和表面的其他方面进行各种基础研究，并了解这些如何影响这些小尺寸实体所表现出的特性