CAREER: Active Transducers for MEMS Resonators in Integrated Circuit Technology

射频微机电（MEM）谐振器的品质因数（Q）通常超过10，000，在通信、工业和汽车应用中已经取得了一些成功。尽管RF MEMS领域已经成熟，但由于集成的复杂性和成本以及MEMS器件和集成电路（IC）晶体管的尺寸之间的巨大差异，与IC的紧密集成还不可能。拟议的5年计划探索使用集成电路晶体管机电转换的多GHz MEMS谐振器将有助于克服这些障碍。智力优势：使用这种转换的谐振器设计的根本性创新将使可扩展的单片集成RF MEMS器件的性能与其芯片外的同类器件相媲美在以前无法实现的频率。将研究MEMS谐振器中的有源换能机制，该机制利用IC技术，利用高增益、高fT晶体管实现高换能器效率。有源换能谐振器将在单晶体管无线电（星星）和RF前端滤波器中实现。这些系统演示需要电路设计的创新，以利用谐振器中有源换能器的优势，采用全新的拓扑结构。更广泛的影响：本研究计划与针对K-12和本科生的教育和推广目标紧密结合，以提高对MEMS和电气工程的认识和理解。通过当地活动（例如剑桥科学节和麻省理工学院妇女技术项目）进行的MEMS实践演示将补充通过该项目开发的基于MEMS的无线电系统的基于网络的演示和教程。这项工作也将服务于一个格拉德/本科生MEMS课程的发展，引入拟议的换能器和MEMS谐振器的课程基础。

Proposal ECCS 1150071Project AbstractRF Micro Electro Mechanical (MEM) resonators, with quality factors (Q) often exceeding 10,000, have seen several success stories spanning communication, industrial, and automotive applications. Despite the maturity of the RF MEMS field, intimate integration with ICs has not been possible due to complexity and cost of integration and large disparity between sizes of MEMS devices and integrated circuit (IC) transistors. The proposed 5-year program exploring multi-GHz MEMS resonators using electromechanical transduction with IC transistors will help overcome these obstacles.Intellectual Merits:Fundamental innovation in resonator design using this transduction will enable scaled, monolithically integrated RF MEMS devices with performance rivaling their off-chip counterparts at previously unattainable frequencies. Active transduction mechanisms in MEMS resonators leveraging IC technology for high transducer efficiency with high-gain, high-fT transistors will be investigated. Actively transduced resonators will be implemented in a Single Transistor Radio (STaR) and RF front-end filters. These system demonstrations require innovation in circuit design to harness the benefits of active transducers in resonators with entirely new topologies.Broader Impacts:This research plan is merged cohesively with an education and outreach objective targeting K-12 and undergraduate students to increase awareness and understanding of MEMS and Electrical Engineering. Hands-on MEMS demonstrations through local events (e.g. Cambridge Science Festival and MIT Women's Technology Program) will supplement web-based demonstrations and tutorials of the MEMS-based radio systems developed through this program. This work will also serve in the development of a grad/undergrad MEMS course, introducing fundamentals of the proposed transducers and MEMS resonators into the curriculum.