Non-Destructive Laser-Induced Transfer of Nanostructures to Flexible Substrates with Sub-5 Nanometer Resolution

以亚 5 纳米分辨率以非破坏性激光诱导纳米结构转移至柔性基材

• 批准号: 1761132
• 负责人: Chenglong Zhao
• 金额: $ 31.72万
• 依托单位: University of Dayton
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2018
• 资助国家: 美国
• 起止时间: 2018-05-15 至 2022-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1761132&HistoricalAwards=false
• 关键词: Non; Destructive; Laser; Induced; Transfer

This grant supports the fundamental study of a new manufacturing process for additive transfer of nanometer-sized structures that are a thousand times smaller than the diameter of a human hair. The process uses a laser to lift the nanostructure non-destructively and place it with sub-5 nanometer precision on a flexible substrate. The process is affordable because it can be done under ambient conditions. Such a capability is important for applications such as wearables, sensors, and other flexible electronics, the economic manufacture of which advances the prosperity and security of the nation. Additive manufacturing or three-dimensional printing is widely used by engineers and designers for rapid prototyping customizable products. Unfortunately, such a rapid prototyping technique is yet to be developed for the nanoscale and for flexible substrates. The importance of manufacturing at the nanoscale lies in the extraordinary properties that materials exhibit at such small scales. Therefore, the ability to manufacture three-dimensional nanometer-sized structures becomes critically important to explore new properties and applications of nanomaterials. Reliable and cost-effective manufacturing of nanostructures and devices on flexible substrates has become increasingly important for the production of wearable devices with a worldwide market expected to reach USD 50 Billion by 2022. This award supports research on nanoscale three-dimensional printing that can enable rapid prototyping of both two-dimensional and three-dimensional nanostructures on flexible substrates. This award also enables broad participation of women and underrepresented minority students in research and education and STEM training of the next-generation workforce.The additive nanomanufacturing method in this research overcomes many limitations that commonly exist in conventional nanomanufacturing methods, which are high-cost, time-consuming, incompatibility with flexible substrates, and lack of customization. This research utilizes localized heating from a low-cost continuous-wave laser to lift-off nanostructures of virtually any shape and size. Through precise electrical manipulation, the lifted nanostructures are transfered and additively placed on flexible, conformal or rigid substrates, non-destructively, to form 3D and 3D nanoscale patterns with sub-5nm resolution. The whole manufacturing process happens under ambient conditions without the need of high-voltage or vacuum, which makes it cost-effective. The project involves precise position and temperature measurements to study the fundamental mechanisms for this manufacturing process. The initial speed and angular distribution of the lifted nanostructures are measured quantitatively by using optical forward scattered detection. The localized temperature in the manufacturing process is measured with temperature sensitive luminescent probes. Selective and compatible nanomanufacturing of complementary, 2D and 3D nanostructures, with high precision nano-scale gaps on flexible substrates are demonstrated.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

这项资助支持了一项新的制造工艺的基础研究，该工艺用于纳米尺寸结构的添加剂转移，该结构比人类头发的直径小一千倍。该工艺使用激光非破坏性地提升纳米结构，并将其以低于5纳米的精度放置在柔性基底上。这个过程是负担得起的，因为它可以在环境条件下进行。这种能力对于可穿戴设备，传感器和其他柔性电子产品等应用非常重要，这些应用的经济制造促进了国家的繁荣和安全。增材制造或三维打印被工程师和设计师广泛用于快速原型定制产品。不幸的是，这种快速原型技术尚未开发用于纳米级和柔性基板。纳米级制造的重要性在于材料在如此小的尺度下表现出的非凡特性。因此，制造三维纳米结构的能力对于探索纳米材料的新性能和应用至关重要。在柔性基底上可靠且具有成本效益地制造纳米结构和器件对于可穿戴设备的生产变得越来越重要，预计到2022年全球市场将达到500亿美元。该奖项支持纳米级三维打印的研究，可以在柔性基底上快速制作二维和三维纳米结构的原型。该奖项还使女性和少数民族学生能够广泛参与下一代劳动力的研究和教育以及STEM培训。本研究中的增材纳米制造方法克服了传统纳米制造方法普遍存在的许多局限性，这些局限性包括成本高，耗时长，与柔性基底不兼容以及缺乏定制。这项研究利用低成本连续波激光器的局部加热来剥离几乎任何形状和尺寸的纳米结构。通过精确的电气操作，提升的纳米结构被转移并添加放置在柔性，保形或刚性基板上，非破坏性地形成3D和3D纳米级图案，分辨率低于5nm。整个制造过程在环境条件下进行，不需要高压或真空，这使得它具有成本效益。该项目涉及精确的位置和温度测量，以研究该制造过程的基本机制。利用光学前向散射检测技术定量测量了纳米结构的初始速度和角分布。制造过程中的局部温度用温度敏感的发光探针测量。该奖项反映了NSF的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

项目成果

Additive nanomanufacturing of metallic nanostructures through a kick-and-place approach (Conference Presentation)

通过踢放方法进行金属纳米结构的增材纳米制造（会议演示）

• DOI: 10.1117/12.2319898
• 发表时间: 2018
• 期刊: SPIE Proceedings
• 作者: Zhao, Chenglong

Laser additive manufacturing at the nanoscales under ambient conditions

环境条件下纳米级激光增材制造

• DOI: 10.1364/noma.2020.notu3c.5
• 发表时间: 2020
• 期刊: Novel Optical Materials and Applications 2020
• 作者: Zhao, Chenglong

Additive Opto-Thermomechanical Nanoprinting and Nanorepairing under Ambient Conditions

• DOI: 10.1021/acs.nanolett.0c01261
• 发表时间: 2020-07-08
• 期刊: NANO LETTERS
• 影响因子: 10.8
• 作者: Alam, Md Shah;Zhan, Qiwen;Zhao, Chenglong
• 通讯作者: Zhao, Chenglong

Optical manipulation with an optothermal surface bubble for ultrasensitive sensing

使用光热表面气泡进行光学操控，实现超灵敏传感

• DOI: 10.1364/oma.2019.aw2e.3
• 发表时间: 2019
• 期刊: Optical Manipulation and Its Applications 2019
• 作者: Zhao, Chenglong

Optothermal microbubble assisted manufacturing of nanogap-rich structures for active chemical sensing

• DOI: 10.1039/c9nr05892c
• 发表时间: 2019-11-21
• 期刊: NANOSCALE
• 影响因子: 6.7
• 作者: Karim, Farzia;Vasquez, Erick S.;Zhao, Chenglong
• 通讯作者: Zhao, Chenglong