EAGER: Collaborative Research: Modeling Silane Spreading and Deposition for Liquid Lithography

EAGER：协作研究：液体光刻的硅烷扩散和沉积建模

• 批准号: 1902512
• 负责人: Daniel Harris
• 金额: $ 5.34万
• 依托单位: Brown University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2019
• 资助国家: 美国
• 起止时间: 2019-06-01 至 2022-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1902512&HistoricalAwards=false
• 关键词: EAGER; Collaborative; Research; Modeling; Silane

Liquid lithography is a promising, versatile, and accessible method for generating three-dimensional (3D) microstructures using standard lithography instrumentation. Extending and simplifying the fabrication process of 3D microstructures will advance a wide variety of technologies such as organ-on-a-chip devices, tissue engineering, microfluidics, optics and microelectronics. This team will develop a liquid lithography process that can be used for a variety of important applications.This project will develop a predictive mathematical model for the diffusion and deposition of silane in a rectangular chamber geometry. Furthermore,by modifying the geometry of the external chamber surrounding the substrate, the passive diffusion process of the silane can be further tuned, allowing for greatly enhanced control of the spatial distribution of the substrate?s surface properties. The investigators will develop, analyze, and benchmark an accessible mathematical model for a critical stage of the process. They will recruit and directly supervise students with particular attention to students from underrepresented backgrounds.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

液体光刻是一种有前途的、通用的且易于使用的方法，用于使用标准光刻仪器生成三维（3D）微结构。扩展和简化3D微结构的制造过程将推动各种技术的发展，如器官芯片器件、组织工程、微流体、光学和微电子学。该团队将开发一种可用于各种重要应用的液体光刻工艺。该项目将开发一种用于矩形腔室几何形状中硅烷扩散和沉积的预测数学模型。此外，通过修改的几何形状的外部腔室周围的基板，硅烷的被动扩散过程可以进一步调整，允许大大增强控制的空间分布的基板？的表面性质。研究人员将为该过程的关键阶段开发，分析和基准测试一个可访问的数学模型。该奖项反映了NSF的法定使命，并通过使用基金会的智力价值和更广泛的影响审查标准进行评估，被认为值得支持。