STTR Phase II: Complementary metal oxide semiconductor (CMOS) integrated piezoelectric vapor sensors

这个小企业创新研究（SBIR）二期项目的更广泛的影响/商业潜力是改善工业、商业和住宅设施中可燃气体泄漏的人员安全。此外，该技术通过解决石油和天然气设施的主要碳排放源之一——甲烷排放，为应对气候变化做出了贡献。该技术能够减少甲烷和制冷剂泄漏，这在石油、天然气和HVACR（采暖、通风、空调和制冷）市场构成了一个重要的市场机会。这项创新可能会解决阻碍在物联网（IoT）应用中广泛采用无处不在的气体传感的重要技术瓶颈。作为一种使能系统，它可以用于各种其他应用领域，例如爆炸物，麻醉品，化学武器的检测，室内空气质量监测以及通过呼吸分析诊断疾病。该小型企业技术转让二期项目旨在开发一种具有无与伦比的尺寸、功率和成本组合的气体传感器，同时提供高检测性能。所提出的架构直接在CMOS（互补金属氧化物半导体）集成电路芯片的后端制造高频体声谐振器，从而实现低成本，批量生产和改善传感器的噪声特性。直接协整还允许制造受体阵列，以获得来自多个目标分析物的响应，这些分析物可用于对材料进行分类，并针对环境混杂因素进行实时校准。该项目的目标是开发一种基于协积压电材料的单芯片气体传感器。这项工作将包括在硅电路上集成谐振器阵列的设计、制造和表征；集成芯片与受体材料，允许选择性吸附目标气体分子；并通过测试来评估气敏性能。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

The broader impact/commercial potential of this Small Business Innovation Research (SBIR) Phase II project is to improve personnel safety from flammable gas leaks in industrial, commercial, and residential facilities. Additionally, the technology contributes to combating climate change by tackling one of the leading sources of carbon emissions, methane emissions from oil and gas facilities. The technology enables the mitigation of methane and refrigerant leaks that constitutes a significant market opportunity in the oil, gas and HVACR (heating, ventilation, air conditioning and refrigeration) markets. The innovation may solve important technical bottlenecks that have prevented widespread adoption of pervasive gas sensing in Internet of Things (IoT) applications. As an enabling system, it may be utilized in a variety of other applications area such as the detection of explosives, narcotics, chemical weapons, indoor air quality monitoring, and diagnosis of disease via breath analysis.This Small Business Technology Transfer Phase II project seeks to develop a gas sensor with an unparalleled combination of size, power, and cost while offering high detection performance. The proposed architecture fabricates high-frequency bulk acoustic resonators directly on the backend of CMOS (Complementary Metal Oxide Semiconductor) integrated circuit chips which permits low-cost, mass-production and improved noise characteristics of the sensors. The direct co-integration also allows the fabrication of a receptor array to obtain responses from multiple target analytes that can be used to classify materials and for real-time calibration against environmental confounders. The objective of this project is the development of a single-chip gas sensor based on co-integrated piezoelectric materials. This effort will consist of the design, fabrication and characterization of integrated resonator arrays onto silicon circuits; integration of the chips with receptor materials, allowing selective adsorption of target gas molecules; and testing to assess the gas sensing performance.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.