STTR Phase I: CMOS integrated piezoelectric vapor sensors

STTR 第一阶段：CMOS 集成压电蒸汽传感器

• 批准号: 2025955
• 负责人: Jose Bahamonde
• 金额: $ 25.6万
• 依托单位: LELANTOS INC.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2020
• 资助国家: 美国
• 起止时间: 2020-08-15 至 2021-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2025955&HistoricalAwards=false
• 关键词: STTR; Phase; CMOS; integrated; piezoelectric

The broader impact/commercial potential of this Small Business Innovation Research (SBIR) Phase I project is to improve safety by detecting toxic chemicals. Toxic chemicals present risks in many sectors; examples include the oil and gas industry, food quality monitoring, waste management optimization, agricultural pest infestations, and even breath analysis for disease detection. This project will advance the development of a low-cost, low-power vapor sensing system, with an initial focus on the threat detection and air quality monitoring market. This Small Business Technology Transfer Phase I project proposes a high sensitivity, micro-fabricated functionalized sensor. The proposed architecture fabricates a high-frequency bulk acoustic resonator directly on CMOS integrated circuits, enabling low-cost mass production and improves the noise characteristics of the sensor. This direct integration simplifies the architecture and allows for suppressed electrical noise and also enables fabrication of an array of highly specific sensors. The project's research objectives include receptor evaluation, resonator fabrication, receptor integration, and sensor testing to characterize the system in relevant applications.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

这个小企业创新研究（SBIR）第一阶段项目的更广泛的影响/商业潜力是通过检测有毒化学物质来提高安全性。有毒化学品对许多部门构成风险；例子包括石油和天然气行业、食品质量监测、废物管理优化、农业害虫侵扰，甚至是用于疾病检测的呼吸分析。该项目将推进低成本、低功耗蒸汽传感系统的开发，最初的重点是威胁检测和空气质量监测市场。这个小企业技术转移一期项目提出了一种高灵敏度、微制造的功能化传感器。提出的结构直接在CMOS集成电路上制造高频体声谐振器，实现低成本的批量生产，并改善传感器的噪声特性。这种直接集成简化了架构，可以抑制电噪声，还可以制造一系列高度特定的传感器。该项目的研究目标包括受体评估、谐振器制造、受体集成和传感器测试，以在相关应用中表征系统。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。