Equipment: MRI: Track 1 Acquisition of a Maskless Photolithography Instrument for Undergraduate Research and Teaching at High Point University

设备： MRI：第一轨采购无掩模光刻仪器，用于海波因特大学本科生研究和教学

• 批准号: 2320222
• 负责人: Brian Augustine
• 金额: $ 14.89万
• 依托单位: High Point University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2023
• 资助国家: 美国
• 起止时间: 2023-09-01 至 2026-08-31
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2320222&HistoricalAwards=false
• 关键词: Equipment; MRI; Track; Acquisition; Maskless

This Major Research Instrumentation (MRI) award is for the acquisition of a maskless photolithography tool for use by faculty and undergraduate researchers in the Departments of Chemistry, Physics and Engineering at High Point University (HPU) (NC) in collaboration with faculty and undergraduate researchers from the Department of Chemistry at the University of Richmond (VA), Department of Physics at James Madison University (VA) and the Department of Biology at the University of Virginia along with other regional undergraduate institutional partners. The ability to rapidly prototype structures and devices with dimensions smaller than a cell is a key enabling capability for a variety of technologies, and the training of undergraduate chemistry, physics and engineering students will help expand the pipeline of future nanotechnologists. Microlithography is a critical processing step in the production of integrated circuits and devices, and developing a trained workforce in nanofabrication is vital to the economic and national security interests of the United States. Finally, structures created using this tool will be used in conjunction with the imaging laboratory at HPU for scientific outreach to local schools and museums in the Piedmont Triad region of North Carolina to spark an interest in the next generation of learners in the micro and nanoscopic world. This instrument will be used to train undergraduate students how to rapidly prototype micro- and nanostructures used in chemical sensing, optics, neuroscience studies, surface engineering and biomedical devices.This Major Research Instrumentation award is for the acquisition of a direct-write maskless photolithography tool for use by faculty and undergraduate researchers at High Point University in collaboration with faculty and undergraduate researchers at James Madison University and the and the University of Virginia. This lithography tool will enable the rapid prototyping of microstructures down to 0.6 µm in support of the researchers on the project team and will be made available to other investigators at regional primarily undergraduate institutions (PUIs) through the Primarily Undergraduate Nanomaterials Cooperative (PUNC) as a resource to help further develop their microfabrication research and educational projects. This project will directly enable the rapid prototyping of microstructures in research projects ranging from polymer materials science to neuroscience. Specifically, these projects include the rapid prototyping of silicone-based microstructures for microfluidic applications and biofilm prevention, microcontact printing (µ-CP) of surfaces for grafting-from conductive polymer synthesis, microfabrication of silicon-based photodetectors, design and prototyping of nanoparticle-enhanced chemical sensing platforms, and rapid prototyping of microfluidic structures for neuroscience studies.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

这个主要的研究仪器（MRI）奖是为获得一个无掩模光刻工具，供教师和本科生研究人员在化学，物理和工程系在高点大学（HPU）（NC）与教师和本科生研究人员从化学系在里士满大学（VA），物理系在詹姆斯麦迪逊大学（弗吉尼亚州）和生物学系在弗吉尼亚大学沿着与其他区域本科院校合作伙伴。快速原型结构和尺寸小于细胞的设备的能力是各种技术的关键使能能力，对本科化学，物理和工程专业学生的培训将有助于扩大未来纳米技术专家的管道。微光刻是集成电路和器件生产中的关键加工步骤，培养训练有素的纳米制造业劳动力对美国的经济和国家安全利益至关重要。最后，使用该工具创建的结构将与HPU的成像实验室一起用于北卡罗来纳州的皮埃蒙特三合会地区的当地学校和博物馆的科学推广，以激发下一代学习者对微观和纳米世界的兴趣。该仪器将用于培训本科生如何快速制作用于化学传感，光学，神经科学研究，表面工程和生物医学设备。这个主要的研究仪器奖是为了获得一个直接的-我与詹姆斯麦迪逊大学的教师和本科生研究人员合作，编写了供高点大学教师和本科生研究人员使用的无掩模光刻工具弗吉尼亚大学。这种光刻工具将使微结构的快速原型制作下降到0.6微米，以支持项目团队的研究人员，并将通过Priestival Undergraduate Nanomaterials Cooperative（PSTO）提供给区域主要本科院校（PUI）的其他研究人员，以帮助进一步发展他们的微制造研究和教育项目。该项目将直接实现从聚合物材料科学到神经科学等研究项目中微结构的快速原型制作。具体而言，这些项目包括用于微流体应用和生物膜预防的硅基微结构的快速原型制作、用于从导电聚合物合成中接枝的表面的微接触印刷（µ-CP）、硅基光电探测器的微制造、纳米颗粒增强化学传感平台的设计和原型制作、该奖项反映了NSF的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准。