STTR Phase I: Microhydraulic Actuator for High-Accuracy, High-Speed Position Stages

这个小型企业技术转移(STTR)第一阶段项目的更广泛影响/商业潜力是开发关键技术，以构建高精度、高吞吐量、半导体先进的封装系统，使芯片的3D集成能够广泛应用于下一代高性能计算。随着与人工智能开发、自动驾驶汽车和下一代移动设备相关的计算能力需求的快速增长，半导体行业正在向3D集成半导体设备过渡。这项技术将把被称为摩尔定律的增长曲线延伸到超过在单个芯片上封装额外晶体管的极限。本项目也论证了微液压执行器技术的总体可行性，为其在机器人其他领域的发展和应用铺平了道路。这个小型企业技术转移(STTR)第一阶段项目致力于在半导体先进封装系统的设计中控制电子设备和设计协议，使其定位精度达到100纳米。高速定位工作台将基于微液压执行器技术，并提供比设计步长提高100倍的性能。该团队将开发必要的电子设备、硬件、控制软件和测量技术，以实现位置精度，同时保持微液压执行器的高响应性。该计划包括组装测试执行器，开发和测试控制硬件和软件，以及建立基于电荷控制、电容反馈和光学图像反馈的位置测量系统的能力。该团队将使用这些测量系统来评估执行器及其控制系统的运动准确性和精确度。该奖项反映了NSF的法定使命，并通过使用基金会的智力优势和更广泛的影响审查标准进行评估，被认为值得支持。

The broader impact/commercial potential of this Small Business Technology Transfer (STTR) Phase I project is to develop the key technology to enable the building of high-precision, high-throughput, semiconductor advanced packaging systems to enable broad adoption of the 3D integration of chiplets for next generation high-performance computing. With the rapid increase in the need for computing power associated with artificial intelligence development, self-driving cars, and next generation mobile devices, the semiconductor industry is transitioning to integrate semiconductor devices in 3D. This technology will extend the growth curve known as Moore’s Law beyond the limit of packing additional transistors onto individual chips. This project may also demonstrate the general feasibility of microhydraulic actuator technology, paving way for its development and applications in other fields of robotics. This Small Business Technology Transfer (STTR) Phase I project seeks to control electronics and design protocols to reach 100 nm in position accuracy in the design of semiconductor advanced packaging systems. The high-speed position stage will be based on the microhydraulic actuator technology and provide an improvement of 100x over the as designed step size. The team will develop the necessary electronics, hardware, control software, and measurement techniques to achieve the position accuracy, while maintaining the high responsiveness of the microhydraulic actuator. The plan includes assembling test actuators, developing and testing the control hardware and software, as well as establishing the capabilities of position measurement systems based on charge control, capacitance feedback and optical image feedback. The team will use these measurement systems to assess the movement accuracy and precision of the actuator and its control system.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.