Simulation-assisted Design and Characterization of Abrasive Magnetic Suspensions for High Precision Finishing

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A common problem in microsystems engineering is the manufacturing of parts with surfaces of optical quality. In many microsystem applications, a nanometric surface roughness is crucial for the performance of the device. Novel manufacturing techniques as e.g. rapid prototyping, can produce a variety of complex geometries, however, with very poor surface quality. To enable the manufacturing of complex geometries with high precision surfaces, a novel finishing technique including custom-designed suspensions is developed. The high quality finishing will be achieved by tailored nano-abrasive magnetorheological fluids, controllable by forces of externally induced magnetic fields. The parameters for the design of the suspensions will be derived by a combined numerical and experimental approach in accordance with the desired nano-finishing quality. The project will provide a sound basis for future ICME approaches employing tailor-made suspensions in microsystem applications.