Thin film technologies and production technologies for active microstructured piezoelectric semi-finished parts (A03)

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Aim of subproject A03 is the development of a high-volume compatible technology for the production of microstructured piezoelectric semi-finished parts (interconnected piezoceramic macro fibers PSV). These parts are used as active elements in aluminum sheet metal parts and injection molded parts. Within the third funding period, the deposition of electrode and a-SiCN:H insulating films on PSV is studied. Further, the stability of the production processes for PSV, namely lapping, stacking, soldering and dicing, needs to be increased. For process monitoring during production and integration of the PSV, the use of electrical and optical online-measurements are investigated.