Random-Phase-Shift-Interferometer

随机相移干涉仪

• 批准号: 36903051
• 负责人: Professor Dr.-Ing. Rainer Tutsch
• 金额: --
• 依托单位: Institut für Produktionsmesstechnik
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2007
• 资助国家: 德国
• 起止时间: 2006-12-31 至 2014-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/36903051?language=en
• 关键词: Random; Phase; Shift; Interferometer

This application is the request for the extension of the project: TU-135/15-1, with the title "Random-Phase-Shift-Interferometer". The work of the former project has been finished and the results can be reviewed in the preliminary report. With the follow-up application, the Random-Phase-Shift-Interferometer for plane surfaces should be enhanced for the measurement of spherical surfaces. It is possible to use the former developed random-phase-shift algorithm also for the measurement of spherical surfaces. For that purpose it is necessary to develope a new method for the determination of the local random relative phase-shift between spherical reference and spherical test wavefront under the influence of vibration. An adequate approach for an evaluation algorithm which is based on the determination of the shift of the centre point of the spherical mirror already exists and is explained more in detail in the section for preliminary work. The already started simulations for the measurement setup to verify the new phase-determination method and to find an appropriate sensor configuration have to be continued. The simulations should also help to find failures during the selection process for the optical components for the setup. To measure spherical surfaces, the setup has to be modified. On the one hand a spherical test surface in combination with a transmission sphere to create the spherical reference wavefront has to be integrated. On the other hand the high temporal resolution detector for the determination of the random phase-shifts has to be modified and tested. At first comparative measurements on spherical surfaces with known shift in all three directions in space will be done with the new setup for the measurement of spherical surfaces, and the deviations between given and measured sphere movement will be analyzed. Finally measurements with different measurement objects of known surface topography on a table without vibration isolation will be made. These measurements will be done under the influence of random vibration, as it appears e.g. in a production environment. The objective of the measurements will be the determination of the relative measurement uncertainty. According to our present knowledge, no other institution currently works on a comparable approach to measure spherical surfaces under the influence of vibration.

本申请书为项目延期申请书：TU-135/15-1，标题为“随机相移干涉仪”。前一个项目的工作已经完成，可以在初步报告中审查结果。随着后续的应用，平面随机相移干涉仪在球面测量中的应用还需进一步加强。以前发展的随机相移算法也可以用于球面的测量。为此，有必要发展一种新的方法来确定在振动影响下球面基准与球面测试波前之间的局部随机相对相移。基于球面反射镜中心点移位的评估算法已经存在一种适当的方法，并在预备工作部分中进行了更详细的解释。为了验证新的相位确定方法和找到合适的传感器配置，必须继续对测量设置进行已经开始的模拟。模拟还应有助于在用于设置的光学组件的选择过程中发现故障。要测量球面，必须修改设置。一方面，必须将球面测试面与透射球相结合以产生球面参考波前。另一方面，用于确定随机相移的高时间分辨率探测器必须进行修改和测试。首先，利用新的球面测量装置对已知空间三个方向位移的球面进行对比测量，并分析给定球运动与测量球面运动之间的偏差。最后，在无隔振的工作台上对已知表面形貌的不同测量对象进行测量。这些测量将在随机振动的影响下进行，例如在生产环境中。测量的目的将是确定相对测量不确定度。据我们目前所知，目前还没有其他机构研究类似的方法来测量振动影响下的球面。