Lab-XCT_Nanometer resolution Optical Coherence Tomography (OCT) using extreme ultraviolet and soft X-rays produced with laboratory laser-driven sources

Lab-XCT_纳米分辨率光学相干断层扫描 (OCT)，使用实验室激光驱动源产生的极紫外和软 X 射线

• 批准号: 381425468
• 负责人: Professor Dr. Gerhard G. Paulus
• 金额: --
• 依托单位: Lehrstuhl Nichtlineare Optik
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2017
• 资助国家: 德国
• 起止时间: 2016-12-31 至 2020-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/381425468?language=en
• 关键词: Lab; XCT_Nanometer; resolution; Optical; Coherence

Optical Coherence Tomography (OCT) is a well-established interferometric imaging technique providing high resolution cross-sectional views of objects (tomograms). The axial resolution of OCT is limited to about 1 µm when using infrared and optical wavelengths. An evident way to improve the resolution is the reduction of the wavelength of the probing light. Optical Coherence Tomography using broad bandwidth radiation in the nanometer spectral range (extreme ultraviolet and soft X-rays) has been proposed and demonstrated recently. This variant of OCT, referred to as XCT, allows for a reduction of the axial resolution from micrometers to a few nanometers. We were able to achieve tomographic imaging with an axial resolution better than 8 nm using extreme ultraviolet and soft X-rays from a synchrotron. The aim of this project is the demonstration of XCT using compact laboratory sources based on laser plasmas and high-order harmonic generation (HHG). Laser plasma sources will be developed by the Polish partner that utilize a double-stream gas puff target irradiated with high-intensity nanosecond laser pulses. The targets are produced by pulsed injection of the working gas into an additional annular stream of gas using a high-pressure electromagnetic valve system with a double nozzle setup. The gas puff target approach allows for an efficient generation of broad-bandwidth extreme ultraviolet radiation and X-rays without target debris production. Laser-driven HHG sources developed by the German partner are based on high harmonic generation (HHG) from gases and solid surfaces. Generation of broad bandwidth radiation in the extreme ultraviolet range (the wavelengths from about 10 nm to about 40 nm) and in the water window soft X-ray range (the wavelengths from 2.3 nm to 4.4 nm) will be investigated with the goal to apply the radiation for XCT. The milestone of this proposal is the demonstration of XCT using optimized laser-driven light sources for the first time. We propose to investigate several samples with laboratory XCT, e.g., semiconductors based on silicon, functional materials and biological samples. For that purpose, the XCT technique will be further improved by reducing artefacts of XCT measurements.

光学相干断层扫描（OCT）是一种成熟的干涉成像技术，可提供物体的高分辨率横截面视图（断层图）。当使用红外和光学波长时，OCT的轴向分辨率被限制为约1 µm。提高分辨率的一个明显方法是减小探测光的波长。最近已经提出并证明了使用纳米光谱范围内的宽带宽辐射（极紫外和软X射线）的光学相干断层扫描。OCT的这种变体，称为XCT，允许将轴向分辨率从微米降低到几纳米。我们能够实现断层成像的轴向分辨率优于8纳米，使用极紫外线和软X射线从同步加速器。该项目的目的是使用基于激光等离子体和高次谐波产生（HHG）的紧凑型实验室光源演示XCT。激光等离子体源将由波兰合作伙伴开发，利用高强度纳秒激光脉冲照射的双流喷气靶。通过使用具有双喷嘴设置的高压电磁阀系统将工作气体脉冲喷射到额外的环形气流中来产生靶。喷气靶方法可以有效地产生宽带极紫外辐射和X射线，而不会产生靶碎片。德国合作伙伴开发的激光驱动HHG源基于气体和固体表面的高次谐波产生（HHG）。将研究在极紫外范围（波长从约10 nm到约40 nm）和在水窗软X射线范围（波长从2.3 nm到4.4 nm）中的宽带宽辐射的产生，目标是将辐射应用于XCT。该提案的里程碑是首次使用优化的激光驱动光源演示XCT。我们建议用实验室XCT研究几个样品，例如，基于硅的半导体、功能材料和生物样品。为此目的，XCT技术将通过减少XCT测量的伪影来进一步改进。

项目成果

Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation

• DOI: 10.1007/s00340-021-07586-w
• 发表时间: 2021-04-01
• 期刊: APPLIED PHYSICS B-LASERS AND OPTICS
• 影响因子: 2.1
• 作者: Skruszewicz，S.;Fuchs，S.;Paulus，G. G.
• 通讯作者: Paulus，G. G.

Laboratory setup for extreme ultraviolet coherence tomography driven by a high-harmonic source.

高谐波源驱动的极紫外相干断层扫描实验室装置

• DOI: 10.1063/1.5102129
• 发表时间: 2019
• 期刊: The Review of scientific instruments
• 作者: J. Nathanael;M. Wünsche;S. Fuchs;T. Weber;J. J. Abel;J. Reinhard;F. Wiesner;U. Hübner;S. J. Skruszewicz;G. G. Paulus;C. Rödel
• 通讯作者: C. Rödel

A high resolution extreme ultraviolet spectrometer system optimized for harmonic spectroscopy and XUV beam analysis.

针对谐波光谱和 XUV 光束分析而优化的高分辨率极紫外光谱仪系统

• DOI: 10.1063/1.5054116
• 发表时间: 2019
• 期刊: The Review of scientific instruments
• 作者: M. Wünsche;S. Fuchs;T. Weber;J. Nathanael;J. J. Abel;J. Reinhard;F. Wiesner;U. Hübner;S. J. Skruszewicz;G. G. Paulus;C. Rödel
• 通讯作者: C. Rödel

Material-specific imaging of nanolayers using extreme ultraviolet coherence tomography

使用极紫外相干断层扫描对纳米层进行材料特异性成像

• DOI: 10.1364/optica.412036
• 发表时间: 2021
• 期刊: Optica
• 影响因子: 10.4
• 作者: F. Wiesner;M. Wünsche;J. Reinhard;J. J. Abel;J. Nathanael;S. J. Skruszewicz;C. Rödel;S. Yulin;A. Gawlik;G. Schmidl;U. Hübner;J. Plentz;G. G. Paulus
• 通讯作者: G. G. Paulus

Absolute EUV reflectivity measurements using a broadband high-harmonic source and an in situ single exposure reference scheme.

使用宽带高次谐波源和原位单次曝光参考方案进行绝对 EUV 反射率测量

• DOI: 10.1364/oe.463216
• 发表时间: 2022
• 期刊: Optics express
• 影响因子: 3.8
• 作者: J. J. Abel;F. Wiesner;J. Nathanael;J. Reinhard;M. Wünsche;G. Schmidl;A. Gawlik;U. Hübner;J. Plentz;C. Rödel;G. G. Paulus;S. Fuchs
• 通讯作者: S. Fuchs