direct observation of hydogen in minerals

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Atomic column images including the light elements as oxygen atom in rock forming minerals were successfully observed using Cs-corrected scanning transmission electron microscope (STEM) with annular detectors (ADF/ABF). The contrast intensity obtained from the atomic image and the square of the average atomic number had the good correlation except of one atomic column. On the other hand, the atomic image from the hydrous mineral including hydrogen could not be clearly obtained because the electron damage and the sample drift. The STEM sample preparation method to be able to observe the atomic image from the specific crystallographical direction were developed using focused ion beam system.