Vacuum gauge available from high vacuum to beyond atmospheric pressure based on leakage of surface acoustic wave propagating on ball to surrounding gases.

利用自然准直声表面波(SAW)在圆锯装置中的超长传播测量了泄漏衰减的压力依赖关系，并尝试实现了从大气压以外的真空计。用铝膜换能器制作的用于抑制散射的球锯装置，在100kPaN_2气氛中，成功地测量了S/N=20传输1m后的波形。此外，通过将幅度衰减曲线拟合为指数函数，成功地精确测量了衰减。泄漏衰减的测量方法是减去与压力无关的外来衰减。结果表明，在300~0.03kPa的压力范围内，压力与压力的关系呈线性关系。根据这些结果，在用圆锯机测量泄漏衰减的基础上，建立了适用于大气压以外的压力计。

The pressure dependence of the leaky attenuation was measured using ultra-long propagation of naturally collimated surface acoustic wave (SAW) in a ball SAW device and the realization of the vacuum gauge available from beyond atmospheric pressure was attempted. The ball SAW device with an interditgital transducer of Al film, useful for suppressing the scattering, succeeded in measuring the waveform after propagating 1 m by S/N of 20 at 100 kPa in N2. Moreover, precise measurement of the attenuation was succeeded by fitting an amplitude decay curve to an exponential function. The leaky attenuation is measured by subtracting extraneous attenuation independent of the pressure. As a result, it was observed that the pressure dependence was linear in the pressure range from 300 kPa down to 0.03 kPa. From these results, the foundation of the pressure gauge available beyond atmospheric pressure was established based on the measurement of the leaky attenuation by the ball SAW device.