Temperature independent SiC photodetector operating up to 500 degreeC

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Ultra-violet photo detectors which can be operated up to 500 degreeC are needed for monitoring system of power plant and chemical plant. Such photo detectors are also expected to be used in engine combustion monitoring for automotive or aerospace field. Silicon (Si) which is mainly used in nowadays electronics cannot be operated at over 200 degreeC due to its small energy bandgap of 1.12 eV. Wide-bandgap semiconductor, silicon carbide (4H-SiC) is promising candidate for such photo detectors. In this study, we investigated optical properties of SiC, which are required for device design. We also found effective suppression method of leakage current which degrades sensitivity of photo detector. Based on these results, we successfully demonstrated operation of SiC photo detectors at 500 degree C.