Development of new type ozonizer with high ozone yield

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Ozone production characteristics for new type ozonizer with double discharge were measured. Ozone concentration for He/ <O_2> mixture was more than three times larger compared with that for <CO_2> /He/ <O_2> mixture and maximum ozone yield of 500 g/kwh was obtained with He/ <O_2> mixture.The effect of HFCD superposition(i.e. improvement of ozone production)was not obserbed clearly in the relative uniform glow discharge.The ozone yield(efficiency)increases with the decrease of input energy density into the discharge volume.It was found that the improvement of the ozone yield was done to change the ratio of capacitances in the trigger circuit.