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White X-ray Topographs using a small and brilliant high energy source

使用小型且明亮的高能量源的白色 X 射线形貌图

基本信息

批准号：
60850119
负责人：
SATO Shin'ichi
金额：
$ 5.57万
依托单位：
Faculty of Engineering, Hokkaido University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research
财政年份：
1985
资助国家：
日本
起止时间：
1985 至 1986
项目状态：
已结题

项目摘要

The Lang's method is the most popular and widely used technique of transmission X-ray topography. However, characteristic X-ray is used in this technique and therefore one has to prepare a thin specimen to get clear topographs especially for materials with heavy atoms.In the present study, we planned to use strong and hard white X-rays emitted from a high power X-ray generator in Hokkaido University. First of all, we tried to produce a specially designed electron gun for a fine focussing X-ray source, since the size of source shoud be as small as possible in the topography using white X-rays. The newly designed gun has double Wehnelt covers, inner and outer, which are insulated each other, the bias voltage being applied independently. The distance between the covers as well as between the target and covers can be adjusted without difficulty. After repeating examinations to minimize the focussing size many times over, we finally obtained a minimum size of 0.08mmX0.90mm, excluding subsidiary focussed intensities. Next, the transmission topographs were taken for thick single crystal plates with heavy atoms, such as Ge, Zn, Cu, Fe, GaAs, InP, CdTe etc,, by using hard and strong white X-ray emitted from the above stated brilliant source. The geometry of X-ray optics was critically studied on the basis of the image resolution and moreover filters with optimum thicknesses for various materials were searched. It was successfully recognized that the white X-ray topograph taken for thick specimens possesses high enough quality, as well as the Lang topographs so far taken for thin specimens.

朗氏法是目前应用最广泛的透射x射线地形学技术。然而，在该技术中使用了特征x射线，因此必须制备薄样品以获得清晰的地形，特别是对于具有重原子的材料。在本研究中，我们计划使用北海道大学高功率x射线发生器发出的强而硬的白色x射线。首先，我们尝试为一个精细聚焦的x射线源制作一个专门设计的电子枪，因为在使用白色x射线的地形中，源的尺寸应该尽可能小。新设计的枪有两个Wehnelt盖，内部和外部，彼此绝缘，独立施加偏置电压。盖板之间的距离以及靶与盖板之间的距离可以轻松调节。经过多次重复检查以最小化聚焦尺寸，我们最终获得了0.08mmX0.90mm的最小尺寸，不包括辅助聚焦强度。其次，利用上述光源发射的硬强白光x射线，对含有Ge、Zn、Cu、Fe、GaAs、InP、CdTe等重原子的厚单晶片进行透射形貌分析。在图像分辨率的基础上，对x射线光学的几何结构进行了严格的研究，并寻找了各种材料的最佳滤光片厚度。成功地认识到厚标本的白色x射线地形图具有足够高的质量，以及迄今为止薄标本的Lang地形图。