Development of a Differential Laser Autocollimation Probe for precision measurement of mirror shapes

开发用于精密测量反射镜形状的差分激光自准直探头

• 批准号: 63850028
• 负责人: KAMADA Osamu
• 金额: $ 2.82万
• 依托单位: TOHOKU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research
• 财政年份: 1988
• 资助国家: 日本
• 起止时间: 1988 至 1989
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-63850028/
• 关键词: Laser Diode; Autocollimation; Differential Measurement; Mirror Shape; Precision Measurement; On Machine Measurement; オンマシン測定; 鏡面; 精密測定; 走査基準; 迅速測定; レーザオートコリメーション

In order to apply the differential laser autocollimation method to on-machine-measurement, a trial probe is made. The probe has been constructed from two collimated beams of laser diode and a PSD position sensitive device ) located in a focal plane of an objective. The resolution and accuracy of the trial probe is about 1 second.In scanning measurements of cross sectional profiles of mirrors, translatory and angular errors during the scanning notion are canceled remarkably. Measured profiles reproduced with maximum deviation of 0.05 micron under residual vibration due to stepping notion of a scanning table.In order to present 3-dimensional profile, it is necessary to scan in and y-direction of surface by DLAC probe and also to measure relative inclination of at least two curves by using single bean laser autocollimation.It has been shown that parabolic surface mirror and plane mirror with a concave error are able to be measured and displayed by 3- dimensional expression. Reproducibility of measured shapes by resetting a specimen after a turn of 90 degree was realized within deviation of 0.1 micron.

为了将差分激光自动插入方法应用于计量测量，进行了试验探测器。该探针是由位于物镜的焦平面中的两个激光二极管和PSD位置敏感设备的孔构造的。试验探针的分辨率和准确性约为1秒钟。在扫描测量镜子的横截面剖面，扫描概念期间的易位和角度误差的扫描测量值明显取消。由于扫描表的踏脚概念，在残留振动下以最大偏差为0.05微米的最大偏差的测得的轮廓。在为了呈现3维轮廓的情况下，有必要通过DLAC探头扫描表面和Y方向通过DLAC探测和Y方向，并通过使用单个bean Laser AutoColiration进行表面反射率，以测量两种曲线。并通过3维表达显示。在90度转弯后通过重置样品的重置测量形状的可重复性在0.1微米的偏差范围内实现。

项目成果

鎌田治: "差動レ-ザオ-トコリメ-ションに関する研究" 精密工会会誌.

Osamu Kamata：《差分激光束准直的研究》精密工业协会杂志。

鎌田治: "差動レ-ザオ-トコリメ-ションに関する研究" (精密工学会誌1990年投稿予定).

Osamu Kamata：“差分激光准直的研究”（预定于1990年提交给日本精密工程学会杂志）。

清野慧: "DATUM INTRODUCED BY SOFTWARE METHODS" Int.Conf.on ADVANCED MECHATROCICS.May 21-24.(1989)Tokyo. 467-472 (1989)

Kei Seino：“DATUM INTRODUCED BY SOFTWARE METHODS”Int.Conf.on ADVANCED MECHATROCICS。May 21-24。（1989）东京467-472（1989）。

清野慧: "DATUM INTRODUCED BY SOFTWARE METHODS" Int.Conf.on ADVANCED MECHATROCICS,May 21-24,(1989)Tokyo. 467-472 (1989)

Kei Seino：“DATUM INTRODUCED BY SOFTWARE METHODS”Int.Conf.on ADVANCED MECHATROCICS，5 月 21-24 日，(1989) 东京 467-472 (1989)。

鎌田治: 精密工学会学術講演会講演論文集. 1. (1989)

Osamu Kamata：精密工程学会学术会议论文集1。（1989）。