Low Temperature Co-fired Ceramic Device Fabrication Facility

低温共烧陶瓷器件制造设备

• 批准号: LE160100228
• 负责人: Prof Yongxiang Li
• 金额: $ 26.67万
• 依托单位: RMIT University
• 依托单位国家: 澳大利亚
• 项目类别: Linkage Infrastructure, Equipment and Facilities
• 财政年份: 2016
• 资助国家: 澳大利亚
• 起止时间: 2016-01-01 至 2017-12-29
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/LE160100228
• 关键词: Low; Temperature; Co; fired; Ceramic

Low temperature co-fired ceramic device fabrication facility: This project seeks to establish a low temperature co-fired ceramics fabrication facility. New kinds of ‘meso-scale’ structurable ceramic processes are filling the technological and dimensional gap between microsystems in silicon and macro microsystems, as the platform can now structure microdevices in the range from a few micrometres to millimetres. This facility would provide a resource for Australian researchers to create novel electronic materials and devices that will be key to achieving breakthroughs in micro/nano-technologies and telecommunications. This project expects to support cutting-edge research into multilayer ceramic microsystems such as microelectromechanical systems, wireless sensors and actuators, radio frequency and microwave devices, microfluidic packaging, interfacing and implantation of ultra-fast photoelectrons and acoustic wave devices.

低温联合陶瓷装置制造设施： 该项目旨在建立低温共同燃烧的陶瓷制造设施。新型的“中尺度”结构陶瓷过程填补了硅和宏观系统中微型系统之间的技术和尺寸差距，因为该平台现在可以在几微米到毫米到毫米的范围内构建微发行版。该设施将为澳大利亚研究人员提供一种资源，以创建新型的电子材料和设备，这将是实现微型/纳米技术和电信的突破的关键。该项目希望支持对多层陶瓷微型系统的最先进的研究，例如微电动机电系统，无线传感器和执行器，射频和微波设备，微流体包装，接口，超快速光电子的接口和植入，并植入。