Low Temperature Co-fired Ceramic Device Fabrication Facility

低温共烧陶瓷器件制造设备

• 批准号: LE160100228
• 负责人: Prof Yongxiang Li
• 金额: $ 26.67万
• 依托单位: RMIT University
• 依托单位国家: 澳大利亚
• 项目类别: Linkage Infrastructure, Equipment and Facilities
• 财政年份: 2016
• 资助国家: 澳大利亚
• 起止时间: 2016-01-01 至 2017-12-29
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/LE160100228
• 关键词: Low; Temperature; Co; fired; Ceramic

Low temperature co-fired ceramic device fabrication facility: This project seeks to establish a low temperature co-fired ceramics fabrication facility. New kinds of ‘meso-scale’ structurable ceramic processes are filling the technological and dimensional gap between microsystems in silicon and macro microsystems, as the platform can now structure microdevices in the range from a few micrometres to millimetres. This facility would provide a resource for Australian researchers to create novel electronic materials and devices that will be key to achieving breakthroughs in micro/nano-technologies and telecommunications. This project expects to support cutting-edge research into multilayer ceramic microsystems such as microelectromechanical systems, wireless sensors and actuators, radio frequency and microwave devices, microfluidic packaging, interfacing and implantation of ultra-fast photoelectrons and acoustic wave devices.

低温共烧陶瓷器件制造设施： 本项目旨在建立一个低温共烧陶瓷制造设施。新型的“介观尺度”结构化陶瓷工艺正在填补硅微系统和宏观微系统之间的技术和尺寸差距，因为该平台现在可以在几微米到毫米的范围内构建微型器件。该设施将为澳大利亚研究人员创造新的电子材料和设备提供资源，这些材料和设备将是实现微/纳米技术和电信突破的关键。该项目预计将支持对多层陶瓷微系统的前沿研究，如微机电系统，无线传感器和执行器，射频和微波器件，微流体封装，超快光电子和声波器件的接口和植入。