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Preparation of Metal Oxide Thin Films by the Surface Fixation Method

表面固定法制备金属氧化物薄膜

基本信息

批准号：
01470083
负责人：
KAGAWA Shuichi
金额：
$ 3.71万
依托单位：
Nagasaki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1989
资助国家：
日本
起止时间：
1989 至 1990
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-01470083/
关键词：
Metal oxides Thin film Coating film Surface fixation method

项目摘要

Thin or coating films of metal oxides were prepared by the surface fixation (SF) method which utilizes the reaction of metal alkoxides with surface hydroxyls of the substrate.1. SiO_2-MgO system : The SiO_2-overlayer were deposited on MgO surface by the vapor-phase SF method using tetramethoxysilane. At coverages less than monolayer, Lewis acid sites, the amount and the strength of which were greater than that of silica gel, were generated possibly because of the electronic and structural interaction through the Mg-O-Si bond formed at the interface. The formation of oxide thin films at or less than monolayer was found to yield new characteristics or functions at the surface or interface.2. SiO_2-zeolite system : The SF methods using tetramethoxysilane in the gas-phase and cyclic dimethylsiloxane oligomer in the liquid-phase produced the SiO_2-overlayer selectively on the external surface of zeolites, which resulted in the control of pore-opening size and the gas adsorbability of zeolites. The control of pore-opening size could be achieved more easily by the liquid-phase method than the vapor-phase method.3. SnO_2-porous Vycor glass system : The formation of SnO_2 thin film on the porous glass by the liquid-phase SF method using tinpropoxide resulted in the appearance of electrical conductivity and the control of gas permeability. The electrical conductivity changed upon contact with in flammable gases, implying that the present SnO_2-porous glass system can be used as a gas sensor element.In conclusions, the surface fixation method makes it possible to deposit thin or coating films of metal oxides stepwise in a chemically controlled manner because the method is based on the chemical reaction at the surface of the substrates, and therefore the property of not only the deposited films but also the substrates can be well controlled.

利用金属醇盐与基片表面羟基的反应，采用表面固定(SF)法制备了金属氧化物薄膜或涂层。SiO_2-MgO系统：采用气相SF法，以正硅酸乙酯为原料，在氧化镁表面沉积SiO_2-覆盖层。在覆盖层小于单分子层时，由于界面形成的Mg-O-Si键的电子和结构相互作用，可能产生了路易斯酸中心，其数量和强度都大于硅胶。研究发现，在单层或以下的氧化物薄膜的形成会在表面或界面产生新的特性或功能。SiO_2-沸石体系：采用气相四甲氧基硅烷和液相环二甲基硅氧烷齐聚物相结合的方法，在沸石外表面选择性地生成SiO_2-覆盖层，从而控制了沸石的开孔尺寸和气体吸附能力。与气相法相比，液相法更容易实现对孔道大小的控制。SnO_2-多孔Vycor玻璃系统：采用锡丙醇盐的液态SF法在多孔玻璃上形成SnO_2薄膜，从而形成导电性和气体渗透性的控制。由于表面固定法是建立在衬底表面的化学反应基础上的，因此可以很好地控制衬底表面的化学反应，从而实现了金属氧化物薄膜或涂层的化学控制沉积。