Fundamental Study for an efficient formation of radicals in the electrical discharge plasma

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In this study, we developed the control method of generating and reducing key radicals at the specified place for the purpose of constructing a new radical reaction engineering. At first, it was examined the behavior of N radicals in the cylindrical surface discharge plasma. On the basis of these experimental results, we made the analysis of the chemical reaction engineering. It was found that the formation rate was balanced with the deactivation rate of N radicals within the residence time of 5 ms. It was also shown that the deactivation of N radicals was the main factor of decreasing formation efficiency of N radicals. From these results, it was realized that the abatement of the deactivation of N radicals on the solid surface was most important for an improvement of radical formation efficiency. Finally, we examined the deactivation rate of N radicals on the cylindrical wall in the laminar flow. As the result, we could make clear the effect of temperature, pressure and material on the deactivation rate of N radicals.