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Profile Measurement of Asymmetrical Aspherical Surfaces

非对称非球面的轮廓测量

基本信息

批准号：
05452140
负责人：
HARADA Tatsuo
金额：
$ 4.54万
依托单位：
Tokyo Metoropolitan University, Faculty of Engineering
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1993
资助国家：
日本
起止时间：
1993 至 1994
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05452140/
关键词：
Asymmetrical aspherical surface Toroidal surface Cylindrical surface Grazing incidence system Profile measurement Laser interferometer Soft x-ray optics

项目摘要

The purpose of this research is to evaluate the profiles of asymmetrical aspherical surfaces such as palaboroidal, ellipsoidal and toroidal surfaces with the same accuracy as those of plane and spherical surfaces. These aspherical surfaces are usually used to focus soft x-rays and extreme ultraviolet radiations in grazing incidence optical systems.The fundamental idea of this newly proposed measurement system is to use laser interfermeter and optical image processing. An asymmetrical aspherical mirror to be measured forms a grazing incidence system so as to focus incident radiation to a point. The grazing incidence system is mounted in a laser interferometer. The fringe pattern obtained with the laser interferometer shows the difference between the wavefront from the grazing incidence system and that with stigmatic focus, corresponding to the profile error of the aspherical surface. Parabolodal and ellipsoidal surfaces satisfy ideal stigmatic focal condition, however, toroidal surface does not. When measuring toroidal surface, the profile difference between the toroid and an ellipsoid is calculated in advance and the profile error of toroidal surface is obtained by subtracting the difference from the total profile obtained from the fringe patern.In experiment, ZYGO MARKII laser interferometer system and ZYGO ZYMOD/PC analytical system are used as a measurement system and profile errors of a toroidal and a cylindrical surfaces are measured.The new measurement system enables the display of total error map of an asymmetrical aspherical surface with the resolution of laser interferometer and the effectiveness is shown especially in a twisted shape of toroid and a taped shape of cylinder. The measurement system can be applied for the evaluation of surface profile generated by active optics which obtains an optical surface profile by elastic diformation of a solid blank.

本研究的目的是以与平面和球面相同的精度评估非对称非球面的轮廓，如掌形、椭球和环面。在掠入射光学系统中，这种非球面通常被用来聚焦软X射线和极紫外光。这种新提出的测量系统的基本思想是使用激光干涉仪和光学图像处理。被测非对称非球面镜形成掠入射系统，将入射辐射聚焦到一点。掠入射系统安装在激光干涉仪中。激光干涉仪得到的条纹图样显示了掠入射系统的波前与有像散焦点的波前的差异，与非球面的面形误差相对应。抛物面和椭球面满足理想的焦距条件，而环面不满足理想的焦距条件。在测量环面面形时，先计算出环面与椭球面间的轮廓度差，再减去干涉条纹得到的总轮廓面的轮廓度误差。实验中，采用Zygo MarkII激光干涉仪系统和Zygo ZYMOD/PC分析系统作为测量系统，对环面和柱面的面形误差进行了测量。新的测量系统能够以激光干涉仪的分辨率显示非对称非球面的总误差图，特别是在环面扭曲形状和柱面胶带形状上表现出了良好的效果。该测量系统可用于通过固体毛坯的弹性变形获得光学表面轮廓的主动光学系统产生的表面轮廓的评定。