Fabrication of high quality grisms for infrared observation

用于红外观测的高质量棱镜的制造

• 批准号: 09555048
• 负责人: HARADA Tatsuo
• 金额: $ 4.03万
• 依托单位: TOKYO METROPOLITAN UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555048/
• 关键词: grism; infrared spectroscopy; diffraction grating; prism; single crystal silicon; ruling engine; anisotropic etching; 回折格子; ルークングエンジン

The purpose of this research is to design and fabricate high quality grisms for infrared spectroscpopic observations. The proposed idea is to generate grating patterns mechanically onto the surface of a grism and form triangularly shaped grating grooves chemically utilizing anisotropic etching of silicon.Here, (1) the process of shaping grating mask patterns mechanically onto the photoresist thin film which is coated onto the grism surface by using a ruling engine, (2) the process of forming SiO_2 grating mask for etching, and (3) the anisotropic etching process of single crystal silicon to form pre-determined saw-tooth groove profile utilizing crystal orientation, are examined experimentally, and standard process of fabricating infra-red grisms is constructed.By adopting this standard process, a silicon grism which covers around 6mum infrared region is designed and fabricated. The grating formed on the grism surface is found to be superior to the conventional mechanically ruled gratings in the figure accuracy of the goove shape and the smoothness and flatness of each facet, and the effectiveness of the proposed process of fabricating infrared grisms is proved.

本研究的目的是设计和制作高质量的红外光谱仪。提出了利用硅的各向异性腐蚀，在棱镜表面机械地形成光栅图形和化学地形成三角形光栅槽的方法，包括：（1）用刻划机在涂覆在棱镜表面的光刻胶薄膜上机械地形成光栅掩模图形的过程;（2）形成SiO_2光栅掩模的过程;实验研究了利用晶体取向对单晶硅进行各向异性刻蚀形成预定锯齿形槽形的工艺，建立了制作红外光栅的标准工艺，并采用该标准工艺设计制作了覆盖6 μ m红外区的硅光栅。实验结果表明，该光栅的沟槽形状精度和各刻面的光滑度、平整度均上级传统的机械刻划光栅，证明了该方法制作红外光栅的有效性。

项目成果

T.Harada, H.Sakuma and M.Fuse: "Fabrication of blazed gratings and grisms utilizing anisotropic etching of silicon" Proceedings of SPIE. Vol.3450. 11-16 (1998)

T.Harada、H.Sakuma 和 M.Fuse：“利用硅的各向异性蚀刻制造闪耀光栅和棱镜”SPIE 论文集。

T.Harada, H.Sakuma, M.Fuse: "Fabrication of blazed gratings and grisms utilizing anisotropic etching of silicon" Proceedings of SPIE. 3450. 11-16 (1998)

T.Harada、H.Sakuma、M.Fuse：“利用硅的各向异性蚀刻制造闪耀光栅和棱镜”SPIE 论文集。